Assembly of charged aerosols on non-conducting substrates via ion-assisted aerosol lithography (IAAL)

Kang, Seunghyon; Jung, Wooik; Kim, Dae Seong; Park, Sei Jin; Choi, Mansoo

doi:10.1016/j.partic.2016.12.001

Cited by 5 publications

(4 citation statements)

References 19 publications

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“…Furthermore, Choi's group developed EAAL to extend the scope of applicable substrates. You et al 39 introduced methods using condensed conducting liquid film on a nonconductive substrate, which can be easily eliminated by evaporation after printing nanoparticles and Kang et al 44 suggested an ion injection technique that utilizes opposite polarity chargers to the accumulated chargers in the growing structures. Using the former technique, PSL nanoparticles are printed on 0.7 mm thick glass and 0.1 mm thick nonconductive and flexible polyethylene terephthalate (PET) films.…”

Section: Nanoparticle Printing Technique Via Eaalmentioning

confidence: 99%

3D Nanoprinting with Charged Aerosol Particles─An Overview

et al. 2021

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Conspectus Three-dimensional (3D) printing is a revolutionary technology allowing rapid, cost-effectively, and flexible design of desired 3D products. In this regard, various techniques for downscaling 3D printing have been developed based on several methodologies in the past decades to exploit the advantages of 3D printing at the micro/nanoscale. The development of 3D nanoprinting techniques has provided a method to design unique and sophisticated nanoscale 3D objects enabling functional applications that are thus far constrained with conventional planar nanomanufacturing processes such as photolithography and electron beam lithography. However, the versatile and practical realization of 3D nanoprinting in a broad science and engineering field remains challenging due to limitations such as feature size resolution, suitable materials, and design flexibility. Therefore, innovative 3D nanoprinting techniques are required to overcome current limitations. In this Account, we describe our achievements in developing 3D nanoprinting with charged aerosols relying on the physics behind counteracting electric fields. We introduce the generation of charged aerosols, the most feasible in the broad range of fundamental building blocks (mainly all types of metals and alloys, their oxides, polymers, and organics) for 3D nanoprinting. Moreover, charged aerosols can be processed at ambient conditions easily. The aerosols could be precisely controlled and delivered for the assembly, using electric fields of complicated configurations despite the Brownian diffusion and other chaotic processes. The converging electric fields are formed around openings by the interactions of two electric fields. One of the electric fields comes from a negatively biased substrate. In contrast, the counteracting electric field comes from the positive ions distributed on a prepatterned dielectric layer over the substrate. As a result, the positively charged aerosols are focused through these fields to grow with nanoscale resolution only in the openings of the layer. Furthermore, a growing structure itself could reconfigure the electric field, producing self-focusing nonlinear effects shaping the printed structure. By lifting the layer over the substrate and translating the latter according to a 3D motion program, we created charged aerosol jets that self-focus on the tips of the growing structure and could print diverse 3D forms. The aerosol jets are also capable of writing on the substrate. The 3D nanoprinting produced using the described approach enables the development of the intricate 3D nanostructures described in the Account in detail, including their material characterization and diverse applications. Finally, we concluded and outlined current challenges and future developments of the 3D nanoprinting with charged aerosol particles.

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Section: Nanoparticle Printing Technique Via Eaalmentioning

confidence: 99%

3D Nanoprinting with Charged Aerosol Particles─An Overview

et al. 2021

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“…Electrically charged gas-phasegenerated NPs offer additional control as an electric field can be used to attract them to the substrate. Recently, new techniques have emerged combining charged aerosol NPs and top-down processing of dielectric materials to enable electric-field assisted aerosol lithography [28] and 3D printing of micro and nanostructures [29,30].…”

Section: Introductionmentioning

confidence: 99%

Single-step generation of 1D FeCo nanostructures

Sedrpooshan,

Ternero,

Bulbucan

et al. 2024

Nano Ex.

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Magnetic one-dimensional structures are attractive nanomaterials due to the variety of potential applications they can provide. The fabrication of bimetallic 1D structures further expands the capabilities of such structures by tailoring the magnetic properties. Here, a single-step template-free method is presented for the fabrication of 1D FeCo alloy nanochains. In this approach, charged single-crystalline FeCo nanoparticles are first generated by the co-ablation of pure Fe and Co electrodes under a carrier gas at ambient pressures and attracted to a substrate using an electric field. When reaching the surface, the particles are self-assembled into parallel nanochains along the direction of an applied magnetic field. The approach allows for monitoring the self-assembly particle by particle as they are arranged into linear 1D chains with an average length controlled by the deposited particle concentration. Facilitated by the self-assembly, the magnetic properties of the structures can be studied in detail. Magnetometry measurements revealed that arranging nanoparticles into nanochains results in a 100% increase in the remanent magnetization, indicating significant shape anisotropy. Furthermore, by combining X-ray microscopy and micromagnetic simulations, we have studied the local magnetization configuration along the nanochains. Our findings show that variations in magnetocrystalline anisotropy along the structure play a crucial role in the formation of magnetic domains.

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“…[24] The fundamentals of this method are based on the works of Heiko Jacobs, Thomas Krinke and Hiroshi Fudouzi on particle deposition using Coulomb forces. [25][26][27][28] An electrostatic lens is a thin dielectric mask made of photo or electronic resist, [21,29] silicon nitride, [30] or silicon dioxide [31,32] with focusing holes of 200-400 nm. Fabrication of this lens requires the use of a DOI: 10.1002/pssr.202300492 A new approach of electrostatically focusing nanoparticles through an electrical tape mask to form narrow <10 μm and conductive microstructures is developed and investigated in this work.…”

Section: Introductionmentioning

confidence: 99%

“…[ 24 ] The fundamentals of this method are based on the works of Heiko Jacobs, Thomas Krinke and Hiroshi Fudouzi on particle deposition using Coulomb forces. [ 25–28 ] An electrostatic lens is a thin dielectric mask made of photo or electronic resist, [ 21,29 ] silicon nitride, [ 30 ] or silicon dioxide [ 31,32 ] with focusing holes of 200–400 nm. Fabrication of this lens requires the use of a multi‐step and expensive lithographic process, and thus limits the prevalence of the IAAL method.…”

Section: Introductionmentioning

confidence: 99%

High‐Resolution Patterning of Conductive Microstructures by Electrostatic Deposition of Aerosol Au Nanoparticles through the Dielectric Mask

Efimov,

Patarashvili,

Maslennikov

et al. 2024

Physica Rapid Research Ltrs

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A new approach of electrostatically focusing nanoparticles through an electrical tape mask to form narrow <10 μm and conductive microstructures is developed and investigated in this work. The presented approach is similar to deposition of material through a stencil and allows one to obtain lines 15 times smaller than the width of the gap in the mask. It is proposed to use ordinary PVC electrical tape as a mask instead of expensive photo or electronic resists. The work investigated the influence of a mask thickness (height) of 60–180 μm, a gap width of 120–380 μm, a substrate potential of 0.1–5 kV, and a deposition time of 10 and 120 min on the geometry and electrical properties of the lines. The substrate material was Si, and charged Au nanoparticles 60 nm in size synthesized by spark discharge were the building blocks of microstructures. Numerical modeling of the process of focusing nanoparticles in COMSOL qualitatively confirmed the found experimental dependencies. The electrical resistivity of the sintered lines is 6.34 times higher than that of bulk gold. The developed approach makes it possible to obtain high‐aspect microstructures, supports operation at atmospheric pressure, and is flexibly controlled in terms of the choice of materials.This article is protected by copyright. All rights reserved.

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Assembly of charged aerosols on non-conducting substrates via ion-assisted aerosol lithography (IAAL)

Cited by 5 publications

References 19 publications

3D Nanoprinting with Charged Aerosol Particles─An Overview

3D Nanoprinting with Charged Aerosol Particles─An Overview

Single-step generation of 1D FeCo nanostructures

High‐Resolution Patterning of Conductive Microstructures by Electrostatic Deposition of Aerosol Au Nanoparticles through the Dielectric Mask

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