“…Thanks to the structure of the planar cross finger, the micro ultracapacitors not only maintain the ultra-long cycle stability, but also show better performance than the traditional sandwich ultracapacitors. Up to now, in-plane interdigital MSCs with excellent electrochemical performance are prepared by various methods such as photolithography ( Kim et al, 2013 ; Wu et al, 2014 ; Diao et al, 2020 ), ink printing ( Li et al, 2017b ; Zhang et al, 2019 ), screen-pritting ( Li et al, 2019a ; Abdolhosseinzadeh et al, 2020 ; Liang et al, 2020 ), laser processing ( Xie et al, 2016 ; Tao et al, 2019 ; Wang et al, 2020b ), spray-masking ( Wang et al, 2017 ; Xiong et al, 2019 ; Zhao et al, 2019 ), electrodeposition ( Makino et al, 2013 ; Li et al, 2017a ; Asbani et al, 2021 ) and 3D printing ( Yu et al, 2017 ; Yu et al, 2018 ; Wang et al, 2020c ). Each method of MSCs preparation has its own advantages and disadvantages, and most of the methods are difficult to satisfy the preparation of multiple MSCs simultaneously.…”