2004
DOI: 10.4218/etrij.04.0203.0027
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Athermalized Polymeric Arrayed-Waveguide Grating by Partial Detachment from a Si Substrate

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Cited by 11 publications
(3 citation statements)
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“…Our approach in the final step is coating the upper cladding at several times by adjusting the thicknesses per each coating step. [11] The experiment was performed to improve the temperature dependence of a 16 x 16 channel AWG. We used the same materials, used for polarization independent AWG.…”
Section: Polarization Independent Polymeric Awgmentioning
confidence: 99%
“…Our approach in the final step is coating the upper cladding at several times by adjusting the thicknesses per each coating step. [11] The experiment was performed to improve the temperature dependence of a 16 x 16 channel AWG. We used the same materials, used for polarization independent AWG.…”
Section: Polarization Independent Polymeric Awgmentioning
confidence: 99%
“…There have been many efforts to reduce the thermal expansion based stresses to give low temperature dependence operation for designed devices. For example authors of [6] propose a new fabrication method for adjusting the temperature dependence of a polymeric arrayed waveguide grating (AWG) on a Si substrate. A temperature dependent wavelength shift was reduced by detaching a part of the polymer film, including the grating channel region of the AWG from the Si substrate while other parts remain fixed on the substrate.…”
Section: Introductionmentioning
confidence: 99%
“…In order to eliminate the undesirable temperature dependence, the athermalization of the AWG has been explored. [5][6][7][8][9][10][11] This enables the AWG to be unaffected by the variation of environment temperature.…”
Section: Introductionmentioning
confidence: 99%