2006
DOI: 10.1016/j.surfcoat.2005.02.171
|View full text |Cite
|
Sign up to set email alerts
|

Atmospheric pressure chemical vapor deposition of titanium nitride on metals

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4
1

Citation Types

0
7
0

Year Published

2011
2011
2024
2024

Publication Types

Select...
6
1

Relationship

0
7

Authors

Journals

citations
Cited by 18 publications
(7 citation statements)
references
References 13 publications
0
7
0
Order By: Relevance
“…The wear resistance of Ti-6Al-4V has been improved by different surface engineering methods such as anodic oxidation (i.e., anodizing [10] and plasma electrolytic oxidation [11]), physical and chemical vapor deposition [12,13], surface melting and alloying [14], stirred friction processing [15], diffusion based treatment [16] ,thermal oxidation [17] and boost diffusion oxidation [18]. Among them, the thermal oxidation is an effective and environmentally friendly technique.…”
Section: Introductionmentioning
confidence: 99%
“…The wear resistance of Ti-6Al-4V has been improved by different surface engineering methods such as anodic oxidation (i.e., anodizing [10] and plasma electrolytic oxidation [11]), physical and chemical vapor deposition [12,13], surface melting and alloying [14], stirred friction processing [15], diffusion based treatment [16] ,thermal oxidation [17] and boost diffusion oxidation [18]. Among them, the thermal oxidation is an effective and environmentally friendly technique.…”
Section: Introductionmentioning
confidence: 99%
“…2(b). Several studies have examined TiN and TiN-based thin films deposited by conventional CVD, at different temperature levels and on several substrates such cemented carbides, tools steel, and silicon wafers [131][132][133][134][135]. Depending on the deposition parameters and on the materials involved, typical values of low temperatures CVD can go from less than 300 °C to ~700 °C [52,[134][135], while moderate-high temperatures are in the range of 800 -1600 °C [134][135][136].…”
Section: Chemical Vapor Deposition (Cvd) Techniquesmentioning
confidence: 99%
“…In addition to its advantages, there are some disadvantages such as low wear resistance and high friction coefficient that limit the usage area [6,7]. Various heat treatments and surface coating techniques are used to eliminate these disadvantages and improve surface properties [8][9][10][11][12][13]. Studies to improve the surface properties of Ti alloys continue by using thin hard film coatings of PVD [10,11] and CVD [12,13].…”
Section: Introductionmentioning
confidence: 99%
“…Various heat treatments and surface coating techniques are used to eliminate these disadvantages and improve surface properties [8][9][10][11][12][13]. Studies to improve the surface properties of Ti alloys continue by using thin hard film coatings of PVD [10,11] and CVD [12,13]. Various coatings with different properties are being developed according to application purposes [6,7,11].…”
Section: Introductionmentioning
confidence: 99%