“…by gas source CVD, there has been renewed interest in its use for the synthesis of monolayer and few-layer chalcogenide films such as MoS2 [75][76][77] and WSe2. [78][79][80][81] A variety of precursors have been employed for the growth of 2D materials including metal carbonyls (W(CO)6 75,80 and Mo(CO)6 [75][76][77] ), halides (MoCl5, 66 WCl6, 65,78 NbCl5 68 ), metalorganics ((CH3)3Bi, 62,82,83 ), organo-chalcogen compounds ((CH3)2Se, 80 , (C2H5)2Se, 65,78,82,84 (C4H9)2Se, 66,68 (C2H5)2S, 75 (C4H9)2S, 77 (C2H5)2Te, 83,85 (C3H7)2Te 62 ), and hydrides (H2S, 76 H2Se 80 ). Except for the hydrides which are supplied as gases, the precursors are typically liquids or solids at room temperature with low to moderate vapor pressure.…”