2013
DOI: 10.1088/0022-3727/46/36/365201
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Atmospheric-pressure plasma enhanced chemical deposition: role of the reactor flow dynamics

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Cited by 7 publications
(7 citation statements)
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“…For efficient ozone production, it is required to minimize the ratio of kδ/k1 + k2 (α). Many reports stated that the lowest α is acquired with the 100-200 Td (Td: Electric field over Particle number density) of reduced electric field, in which Sabadil et al (1980) calculated 4 of theoretical minimum α at 110 Td (Bogaerts et al 2002;Descamps et al 2013;Liu et al 2012). This indicates that a single atom oxygen essential for ozone generation is generated in the filament channel.…”
Section: Optimum Discharge Pressurementioning
confidence: 99%
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“…For efficient ozone production, it is required to minimize the ratio of kδ/k1 + k2 (α). Many reports stated that the lowest α is acquired with the 100-200 Td (Td: Electric field over Particle number density) of reduced electric field, in which Sabadil et al (1980) calculated 4 of theoretical minimum α at 110 Td (Bogaerts et al 2002;Descamps et al 2013;Liu et al 2012). This indicates that a single atom oxygen essential for ozone generation is generated in the filament channel.…”
Section: Optimum Discharge Pressurementioning
confidence: 99%
“…By decreasing the gap distance at a constant gas flow rate makes the flow velocity faster in the discharge area. Blurred filament channels by gas flow, so called afterglow plasma, has influence on the filament size and the arrangement in the discharge area so that the filament volume and spacing increases (Descamps et al 2013;Liu et al 2012). According to the results, the fact that the optimum pressure increases by decreasing the gap distance can be explained by the blurred filament, which becomes more effective as the gas flow velocity increases.…”
Section: Optimum Discharge Pressurementioning
confidence: 99%
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“…However, conventional APPJs have difficulty in realizing plasma polymerization due to the low plasma energy in ambient air conditions; as a result, they would not feed enough energy for activation to the monomers. In spite of intensive studies, only a few groups have reported successful plasma polymerization using APPJs [ 40 , 41 , 42 , 43 , 44 ]. Nonetheless, most plasma polymer films grown using the APPJs tend to show poor film qualities, such as low molecular weight and weak chemical stabilities, which would inherently result from the use of plasma with low density and electron temperature in monomer fragmentation (or active) and recombination (or passive) regions.…”
Section: Introductionmentioning
confidence: 99%
“…However, it should be emphasized here that it is very difficult to operate in a completely air‐free environment for atmospheric pressure in‐line processing; in practice, there is always a non‐negligible quantity of air/oxygen entrained to the reactor. Recognition of this operational consequence is essential, particularly when considering plasma deposition techniques that require the discharge atmosphere to be carefully adjusted . An additional problem is that plasma deposition techniques typically require steady, diffuse plasmas; reliable control of such homogeneous discharges is generally agreed to be difficult at atmospheric pressure except under very specific operating conditions and limited gas compositions.…”
Section: Challenges In Plasma Sciencementioning
confidence: 99%