2005
DOI: 10.4028/3-908451-12-4.119
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Atmospheric Pressure Plasma Jets for 2D and 3D Materials Processing

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“…Such processes are particularly promising to treat complex 3D objects by mounting the plasma source on a robot. Table 3 shows a list of works performed with millimetric jets and torches for PECVD at atmospheric pressure (Ref [76][77][78][79][80][81][82][83][84][85][86]. Historically, plasma micro-torches were proposed with thermal plasmas (Ref 87-89) rather than with nonequilibrium plasmas.…”
Section: Influence Of the Plasma Size On Depositionmentioning
confidence: 99%
“…Such processes are particularly promising to treat complex 3D objects by mounting the plasma source on a robot. Table 3 shows a list of works performed with millimetric jets and torches for PECVD at atmospheric pressure (Ref [76][77][78][79][80][81][82][83][84][85][86]. Historically, plasma micro-torches were proposed with thermal plasmas (Ref 87-89) rather than with nonequilibrium plasmas.…”
Section: Influence Of the Plasma Size On Depositionmentioning
confidence: 99%