1965
DOI: 10.1007/978-3-642-46025-8
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Atomic and Ionic Impact Phenomena on Metal Surfaces

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Cited by 500 publications
(131 citation statements)
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“…One possible explanation is increased sputtering coefficients for non-perpendicular ion incidences. However, this would not increase the physical sputtering loss enough to account for the observed loss, even assuming the forward-sputtered material is not redeposited on the sample [7]. Another possible explanation is the loss of the small protrusions during the irradiation process.…”
Section: Resultsmentioning
confidence: 90%
“…One possible explanation is increased sputtering coefficients for non-perpendicular ion incidences. However, this would not increase the physical sputtering loss enough to account for the observed loss, even assuming the forward-sputtered material is not redeposited on the sample [7]. Another possible explanation is the loss of the small protrusions during the irradiation process.…”
Section: Resultsmentioning
confidence: 90%
“…[5][6][7][8] we estimate sputtering yields on iron-nickel-chromium alloys in · the.energy range 1 keV to 10 keV to be 0.03 for D, 0.04 for T, 0.3 for He, and 2.0 for Ar. These values are expected to be good to better than an order of magnitude· and, in fact, the value obtained this way falls within a factor of two of the experimental data in Fig.…”
Section: Sputteringmentioning
confidence: 99%
“…A lot of studies have been done using the collector technique [3][4][5][6][7]. Experimental results show that preferential ejections of sputtered atoms occur along certain crystallographic directions.…”
Section: Introductionmentioning
confidence: 99%