2023
DOI: 10.1016/j.cap.2022.11.014
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Atomic arrangement of van der Waals heterostructures using X-ray scattering and crystal truncation rod analysis

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Cited by 7 publications
(2 citation statements)
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“…This ML analysis is beneficial for analyzing the growth dynamics and layer thicknesses for ultrathin van der Waals thin films, and the corresponding results are consistent with those of the K-means clustering method. Our results suggest that the ML-assisted RHEED analysis could be developed into an automatic validation method for investigating ultrathin 2D materials films, and it is complementary to other surface analysis tools [ 7 , 38 , 39 ]. Furthermore, this method can be applied to analyze the thin-film growth of other 2D materials, such as 2D chalcogenides, 2D MXenes, 2D oxides, and hexagonal boron nitrides [ 40 43 ].…”
Section: Discussionmentioning
confidence: 95%
“…This ML analysis is beneficial for analyzing the growth dynamics and layer thicknesses for ultrathin van der Waals thin films, and the corresponding results are consistent with those of the K-means clustering method. Our results suggest that the ML-assisted RHEED analysis could be developed into an automatic validation method for investigating ultrathin 2D materials films, and it is complementary to other surface analysis tools [ 7 , 38 , 39 ]. Furthermore, this method can be applied to analyze the thin-film growth of other 2D materials, such as 2D chalcogenides, 2D MXenes, 2D oxides, and hexagonal boron nitrides [ 40 43 ].…”
Section: Discussionmentioning
confidence: 95%
“…RHEED is a powerful technique that monitors the surface state during lm growth because it provides extensive physical information, including surface morphology, growth rate, lattice spacing, crystalline disorder, and surface reconstruction. [74][75][76][77][78][79][80] Using the RHEED dataset, we will conduct a more quantitative analysis of the growth modes of 2D materials over time and identify crystal structures during the lm growth. [81][82][83][84] Along with the in situ RHEED data, we collected diverse surface analysis results for targeted samples, including AFM images, XPS, and PL/Raman spectra.…”
Section: Data Generationmentioning
confidence: 99%