Atomic force microscopy of high velocity cluster impact induced nanostructures

Blanckenhagen, P. von; Gruber, A.; Gspann, J.

doi:10.1016/s0168-583x(96)00656-8

Cited by 22 publications

(13 citation statements)

References 4 publications

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“…[1][2][3][4][5][6][7] Clusters of gaseous elements and compounds consisting of hundreds to thousands of atoms, with energies from a few eV to a few hundreds of eV per cluster atom are of particular interest for surface modification.…”

Section: Introductionmentioning

confidence: 99%

Craters on silicon surfaces created by gas cluster ion impacts

Allen¹,

Insepov

Fenner³

et al. 2002

Journal of Applied Physics

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Atomic force microscopy ͑AFM͒ and high-resolution transmission electron microscope ͑HRTEM͒ cross section imaging of individual gas cluster ion impact craters on Si͑100͒ and Si͑111͒ substrate surfaces is examined. The comparison between 3 and 24 kV cluster impacts from Ar and O 2 gas sources is shown. Results for low fluence (10 10 ions/cm 2 ) 24 kV Ar individual cluster impacts onto a Si͑100͒ and Si͑111͒ substrate surfaces are compared with hybrid molecular dynamics ͑HMD͒ simulations. A HMD method is used for modeling impacts of Ar n (nϭ135, 225͒ clusters, with energies of 24 -50 eV/atom, on Si͑100͒ and Si͑111͒ surfaces. On a Si͑100͒, craters are nearly triangular in cross section, with the facets directed along the close-packed ͑111͒ planes. The Si͑100͒ craters exhibit four-fold symmetry as imaged by cross-sectional HRTEM, and AFM top view, in agreement with modeling. In contrast, the shape of craters on a Si͑111͒ shows a complicated six-pointed shape in the modeling, while AFM indicates three-fold symmetry of the impact. The lower energy 3 kV individual cluster impacts reveal the same crater shape in HRTEM cross section for both Ar and O 2 gas clusters, but with shallower crater depth than for the higher-energy impacts. The kinetics of the Ar and O 2 crater impacts may explain the successful use of higher-energy cluster impacts for etching material of higher initial surface roughness followed by the lower-energy impacts as an effective finishing step to achieve smoother surfaces.

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Section: Introductionmentioning

confidence: 99%

Craters on silicon surfaces created by gas cluster ion impacts

Allen¹,

Insepov

Fenner³

et al. 2002

Journal of Applied Physics

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“…The effect could be explained by the investigation of isolated impacts on highly polished silicon using atomic force microscopy [3]. It turned out that an isolated impact creates on the surface a very flat hillock -instead of the expected crater [4].…”

Section: Introductionmentioning

confidence: 99%

“…Figure 1 shows a schematic view of the experimental setup used for the diamond nanostructuring by accelerated cluster erosion. In comparison with earlier versions [2,3,5,7,8], the arrangement now allows to generate also clusters of lower boiling gases, such as argon, since liquid helium cooling of the cryopanels for pumping the expanding nozzle gas has been installed.…”

Section: Introductionmentioning

confidence: 99%

Nanostructuring of single crystal diamond by reactive and non-reactive accelerated cluster erosion

Becker¹,

Gspann²,

Krämer³

2001

The European Physical Journal D

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Reactive accelerated cluster erosion (RACE) of single crystal artificial diamond has been used to fabricate various nano-and microstructures. Carbondioxide clusters of about 1000 molecules are accelerated to 100 keV to act as the eroding agent. Using movable shadow masks, the accelerated cluster beam may erode staircase structures acting as an optical grating. A cycloid gear has been generated via a stationary nickel mask. Non-reactive accelerated cluster erosion using argon clusters will be considered for comparison.

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“…Cluster erosion has been shown to yield very smooth surfaces, 3 with values of the root-mean-square roughness of the order of 1 nm in the case of silicon. 6,7 High surface finish is of paramount importance in micromechanics, because of the growing role of friction versus inertia due to the increasing surface-to-volume ratio.…”

Section: Introductionmentioning

confidence: 99%

Surface smoothing of single‐crystal diamond by high‐speed cluster impacts with and without reactive erosion

Krämer¹,

Yamaguchi²,

Gspann³

2004

Surface & Interface Analysis

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The smoothness of cluster-eroded surfaces of natural and synthetic diamond (Monodite) is compared after erosion with high-speed CO 2 as well as Ar cluster beams. The reactive accelerated cluster erosion (RACE) of the single-crystal diamond substrates using CO 2 clusters leads to a fourfold larger root-mean-square roughness than the erosion with non-reactive Ar clusters. On the other hand, the erosion rate observed with the accelerated Ar clusters is lower by about the same factor than that observed with the accelerated CO 2 clusters. Molecular dynamics calculations reveal corresponding differences already in the simulations of single cluster impacts.

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Atomic force microscopy of high velocity cluster impact induced nanostructures

Cited by 22 publications

References 4 publications

Craters on silicon surfaces created by gas cluster ion impacts

Craters on silicon surfaces created by gas cluster ion impacts

Nanostructuring of single crystal diamond by reactive and non-reactive accelerated cluster erosion

Surface smoothing of single‐crystal diamond by high‐speed cluster impacts with and without reactive erosion

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