Springer Proceedings in Physics
 1989
DOI: 10.1007/978-3-642-93413-1_17
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Atomic Hydrogen Passivation Studies of Microcrystalline Phases in Ion-Implant Damaged Surface Layers of Silicon

Hung‐Chang Chien
1
,
K. Srikanth
2
,
S. Ashok
3
et al.
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