Articles you may be interested inAtomic layer deposition TiO2-Al2O3 stack: An improved gate dielectric on Ga-polar GaN metal oxide semiconductor capacitors J. Vac. Sci. Technol. B 32, 060602 (2014); 10.1116/1.4897919 Improved oxidation resistance of organic/inorganic composite atomic layer deposition coated cellulose nanocrystal aerogels Surface modification of nitrogen-doped carbon nanotubes by ozone via atomic layer deposition J. Vac. Sci. Technol. A 32, 01A124 (2014); 10.1116/1.4847995Engineering titanium and aluminum oxide composites using atomic layer deposition Layers of alumina, titania and double layers of alumina/titania (and reverse) were deposited onto bundles of carbon fibers in an atomic layer deposition process. Scanning electron microscopy (SEM) images of the coated carbon fibers revealed that each fiber of a bundle was coated homogenously and separately and that no bridges were formed between the fibers. Transmission electron microscopy and SEM images showed that the coating was conformal, uniform, had a good adhesion to the fiber surface and that the morphology of the coating surface was similar to that of fiber surface. In case of double layers, the average deposition rate of coatings did not depend on the sequence of layer deposition. After coating, the carbon fibers were selectively removed by thermal oxidation in air at temperatures of 550 C and 900 C, leading to metal oxide microtubes.