“…The properties of materials at the nanoscale strongly depend on their size, shape, chemical composition, and surface area (Bechelany et al, 2015;. Thus, ALD has been extensively used to modify and enhance different electrical, optical, catalytical, and structural properties of biosensor materials (Chen et al, 2004;Cheun et al, 2010;O'Neill et al, 2015;Wang et al, 2012).…”