2021
DOI: 10.1016/j.surfcoat.2021.127390
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Atomic layer deposition of iron oxide on a porous carbon substrate via ethylferrocene and an oxygen plasma

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Cited by 9 publications
(18 citation statements)
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“…The ALD process explored in this work, which was recently published by the authors, utilizes an oxygen plasma (O plasma) to deposit FeO x using the inexpensive and air stable precursor ethylferrocene (EF). Details of the process development can be found elsewhere . However, previous investigations in our group found that an O plasma reactant during ALD can etch the carbon substrate. , Indeed, this was also the case in the current work, where TEM imaging of FeO x deposited by ALD on a carbon-coated TEM grid revealed that the carbon substrate was severely damaged (Figure S1a).…”
Section: Introductionsupporting
confidence: 71%
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“…The ALD process explored in this work, which was recently published by the authors, utilizes an oxygen plasma (O plasma) to deposit FeO x using the inexpensive and air stable precursor ethylferrocene (EF). Details of the process development can be found elsewhere . However, previous investigations in our group found that an O plasma reactant during ALD can etch the carbon substrate. , Indeed, this was also the case in the current work, where TEM imaging of FeO x deposited by ALD on a carbon-coated TEM grid revealed that the carbon substrate was severely damaged (Figure S1a).…”
Section: Introductionsupporting
confidence: 71%
“…This is the same structure determined in our previous work on FeO x ALD using the same precursor. 52 Table S3 provides a more detailed indexing of the patterns, including the measured interplanar spacings and the corresponding PDF cards for both α-Fe 2 O 3 and Mn 3 O 4 .…”
Section: Resultsmentioning
confidence: 99%
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“…Lu et al applied oxygen-selective membranes based on polymers and metal–organic framework containing −OH and −NH 2 groups to effectively trap H 2 O and CO 2 . Non-solvent-induced phase separation, ,, solution deposition, , and evaporation-deposition are commonly used methods to fabricate GDLs with oxygen selectivity and water permeation resistance. However, both methods suffer from poor conformality and limited thickness control on the surface.…”
Section: Introductionmentioning
confidence: 99%