Atomic Layer Deposition of Li–Me–O Thin Films as Electrode Materials for Nanodevices Power Sources

Abstract

The development of nanoscale power sources with a long battery life is now required for novel nanoelectronic devices, such as wireless sensors, biomedical implants, and smart cards. Lithiated metal oxides (Li–Me–O) are widely used in lithium-ion batteries (LIBs). Depending on the type of metal, Li–Me–O can be applied as cathode, anode, or electrolyte materials. Atomic layer deposition (ALD), due to its precision control over thickness, purity, and uniformity over large areas of applied coatings, can be applied for the synthesis of a different thin film LIBs materials. In the present work, the deposition of Li–Sn–O (anode) and Li–Al–O (electrolyte) by ALD is considered. The prepared films were investigated with the use of X-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectrometry.