Atomic Layer Deposition of Platinum Nanoparticles on Carbon Nanotubes for Application in Proton‐Exchange Membrane Fuel Cells

Liu, Chueh; Wang, Chih-Chieh; Kei, Chi-Chung; Hsueh, Yang-Chih; Perng, Tsong‐Pyng

doi:10.1002/smll.200900278

Cited by 181 publications

(131 citation statements)

References 23 publications

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“…This is surprising when considering that Pt ALD initiation on carbon nanotubes has been reported to be challenging. [37][38][39] However, EBID of Pt has been achieved on carbon nanotubes in several studies. 27,40 The microstructure of the EBID seed layer consisting of Pt grains embedded in amorphous carbon 41 most likely plays an important role in the nucleation of Pt ALD on the carbon nanotube.…”

mentioning

confidence: 99%

Resist-free fabricated carbon nanotube field-effect transistors with high-quality atomic-layer-deposited platinum contacts

Mackus

Thissen

Mulders³

et al. 2017

Applied Physics Letters

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confidence: 99%

Resist-free fabricated carbon nanotube field-effect transistors with high-quality atomic-layer-deposited platinum contacts

Mackus

Thissen

Mulders³

et al. 2017

Applied Physics Letters

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“…Because of its high work function, platinum is also appropriate for use as a gate metal with high-κ dielectrics in metal-oxide-semiconductor field effect transistors (MOSFETs) [4,5]. Additionally, Pt is widely used in fuel cells due to its high catalytic activity [6,7]. Therefore, the combination of nanostructured semiconducting materials and metal nanotubes has the potential to produce novel multifunctional vertically-ordered three-dimensional nanodevices.…”

mentioning

confidence: 99%

“…In order to achieve a high deposition rate, a smooth surface topography and to minimize impurity content, a deposition temperature of 300 °C was determined to be optimum for the ALD process. The increase in growth rate at deposition temperatures higher than 320 °C is indicative of the decomposition of the Pt precursor [7]. Figure 1(a) shows a crosssectional transmission electron microscopy (TEM, XTEM, JEOL 2100F) analysis of the initial stage of ALD Pt deposition on planar Si substrates covered with native oxide.…”

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confidence: 99%

Precise control of highly ordered arrays of nested semiconductor/metal nanotubes

Baumgart

Tapily

et al. 2010

Nano Res.

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Lithographically defined microporous templates in conjunction with the atomic layer deposition (ALD) technique enable remarkable control of complex novel nested nanotube structures. So far three-dimensional control of physical process parameters has not been fully realized with high precision resolution, and requires optimization in order to achieve a wider range of potential applications. Furthermore, the combination of composite insulating oxide layers alternating with semiconducting layers and metals can provide various types of novel applications and eventually provide unique and advanced levels of multifunctional nanoscale devices. Semiconducting TiO 2 nanotubes have potential applications in photovoltaic devices. The combination of nanostructured semiconducting materials with nested metal nanotubes has the potential to produce novel multifunctional vertically-ordered three-dimensional nanodevices. Platinum growth by ALD has been explored, covering the initial stages of the thin film nucleation process and the synthesis of high aspect ratio nanotube structures. The penetration depth of the Pt into porous templates having various pore sizes and aspect ratios has been investigated. Several multi-walled nested TiO 2 -Pt nanotubes in series have been successfully fabricated using microporous Si templates. These innovative nested nanostructures have the potential to produce novel multifunctional vertically-ordered three-dimensional nanodevices in photovoltaic and sensing technologies. KEYWORDSAtomic layer deposition (ALD) platinum nanotubes, semiconductor/metal nanotubes, microporous Si templates, nanoporous alumina templates, multilayer nested nanotubes For several decades, the fabrication of nanostructures having highly-ordered, complex architectures has been one of the most interesting research topics. These structures have the potential to advance current technologies and enable the development of newer and more innovative applications of all kinds. In the past few years, vertically-ordered, self-organized nanotubes and nanorods have been synthesized using anodic aluminum oxide (AAO) or silicon (Si) nano/micropore templates. Most coaxial nanotubes currently produced with nanotemplates maintain three-dimensional scales close to those of the original Nano

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“…[25] Pt nanoparticle growth by ALD has in turn been explored for catalytic purposes. [26][27][28] The main problem of using ALD nanoparticle deposition to be employed in the field of plasmonics is a lack of easy to use processes for the most suitable metals in this field, that is, silver and gold. Only a single report exists on radical enhanced ALD of silver and even if the films had reasonably low resistivity of 6 mW cm, they contained quite substantial amounts of impurities.…”

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confidence: 99%

Silver Coated Platinum Core–Shell Nanostructures on Etched Si Nanowires: Atomic Layer Deposition (ALD) Processing and Application in SERS

et al. 2010

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A new method to prepare plasmonically active noble metal nanostructures on large surface area silicon nanowires (SiNWs) mediated by atomic layer deposition (ALD) technology has successfully been demonstrated for applications of surface-enhanced Raman spectroscopy (SERS)-based sensing. As host material for the plasmonically active nanostructures we use dense single-crystalline SiNWs with diameters of less than 100 nm as obtained by a wet chemical etching method based on silver nitrate and hydrofluoric acid solutions. The SERS active metal nanoparticles/islands are made from silver (Ag) shells as deposited by autometallography on the core nanoislands made from platinum (Pt) that can easily be deposited by ALD in the form of nanoislands covering the SiNW surfaces in a controlled way. The density of the plasmonically inactive Pt islands as well as the thickness of noble metal Ag shell are two key factors determining the magnitude of the SERS signal enhancement and sensitivity of detection. The optimized Ag coated Pt islands on SiNWs exhibit great potential for ultrasensitive molecular sensing in terms of high SERS signal enhancement ability, good stability and reproducibility. The plasmonic activity of the core-shell Pt//Ag system that will be experimentally realized in this paper as an example was demonstrated in numerical finite element simulations as well as experimentally in Raman measurements of SERS activity of a highly diluted model dye molecule. The morphology and structure of the core-shell Pt//Ag nanoparticles on SiNW surfaces were investigated by scanning- and transmission electron microscopy. Optimized core-shell nanoparticle geometries for maximum Raman signal enhancement is discussed essentially based on the finite element modeling.

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Atomic Layer Deposition of Platinum Nanoparticles on Carbon Nanotubes for Application in Proton‐Exchange Membrane Fuel Cells

Cited by 181 publications

References 23 publications

Resist-free fabricated carbon nanotube field-effect transistors with high-quality atomic-layer-deposited platinum contacts

Resist-free fabricated carbon nanotube field-effect transistors with high-quality atomic-layer-deposited platinum contacts

Precise control of highly ordered arrays of nested semiconductor/metal nanotubes

Silver Coated Platinum Core–Shell Nanostructures on Etched Si Nanowires: Atomic Layer Deposition (ALD) Processing and Application in SERS

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