Atomic Layer Deposition of Superconducting CuO Thin Films on Three-Dimensional Substrates

Abstract

In previous decades, investigation of superconductors was aimed either at finding materials with higher critical temperatures or at discovering nontypical superconducting behavior. Here, we present the cupric (CuO) thin films, which were synthesized by atomic layer deposition by using a metal-organic precursor, copper (II)-bis-(-dimethylamino-2-propoxide), and ozone as an oxidizer. The deposition process was optimized by employing a quartz crystal monitoring, and the contact between the deposited films and planar and three-dimensional SiO2/Si substrates was examined by scanning electron microscopy with a focused ion beam module. Phase and elemental composition were analyzed by X-ray diffraction and X-ray fluorescence. Two-probe electrical resistivity measurements revealed a resistivity drop below the critical temperature of 4 K, which may indicate low-temperature superconductivity of the CuO thin films.

CuO/SnS2 Nanoparticles on PEDOT:PSS for Nonenzymatic Electrochemical Glucose Sensors

“…13 The hydrothermal method is versatile, environmentally friendly, and relatively simple for synthesizing CuO nanoparticles (NPs). 14 CuO has numerous applications such as gas sensors, 15 superconductors, 16 solar cells, 17 and batteries 18 owing to their unique properties and advantages such as low cost, ecofriendly, nontoxic, and fast electrontransfer rates. 19 Therefore, CuO is considered to be a strong candidate for fabricating electrochemical-based nonenzymatic sensors for glucose detection.…”

Creation of One- and Two-Dimensional Copper and Zinc Oxides Semiconductor Structures

“…Liquid-phase routes, including sol-gel-assisted dip-and-spin coating, spray pyrolysis, and electrodeposition, are also used [93]. To create thin films and two-dimensional CuO layers, besides chemical bath deposition (CBD) [94][95][96], atomic layer deposition (ALD) [97,98] is used. The method of hydrothermal synthesis, in which copper precursors react with oxygen in an aqueous solution at elevated temperatures and pressures, is used to fabricate 1D and 2D copper oxide (CuO) structures [88,89].…”

“…Liquid-phase routes, including sol-gel-assisted dip-and-spin coating, spray pyrolysis, and electrodeposition, are also used [93]. To create thin films and two-dimensional CuO layers, besides chemical bath deposition (CBD) [94][95][96], atomic layer deposition (ALD) [97,98] is used.…”

Effect of repeating hydrothermal growth processes and rapid thermal annealing on CuO thin film properties

“…These encompass methods such as molecular beam epitaxy [17][18][19], direct current magnetron sputtering [4,20,21], and pulsed laser deposition [22][23][24]. Alternative approaches involve techniques such as chemical vapor deposition [25][26][27] and atomic layer deposition [28][29][30]. CuO thin films can also be grown from liquid phases, employing techniques such as chemical bath deposition [31][32][33], successive ionic layer adsorption and reaction (SILAR) [34][35][36], sol-gel processes (using dip and spin coating) [37][38][39], as well as spray pyrolysis [40][41][42].…”