Atomic Layer Deposition of Ta₂O₅/Polyimide Nanolaminates

Abstract

Ta 2 O 5 /polyimide nanolaminates are deposited at 170 8C by atomic layer deposition (ALD). The precursors are tantalum ethoxide and water for Ta 2 O 5 , and pyromellitic dianhydride (PMDA) and diaminohexane (DAH) for polyimide. The nanolaminates are characterized by X-ray reflection (XRR), field emission scanning electron microscopy (FESEM), atomic force microscopy (AFM), capacitance and current-voltage measurements, and nanoindentation. The layered structure is confirmed by the XRR data and FESEM images. By controlling the relative thicknesses of the Ta 2 O 5 and polyimide layers, the dielectric and mechanical properties of the nanolaminates are tailored over wide ranges. Dielectric properties of the nanolaminates are improved compared to bare Ta 2 O 5 and polyimide films. Elasticity of the nanolaminate films increases with the polyimide content.

Organic and inorganic–organic thin film structures by molecular layer deposition: A review

“…Salmi et al [62] fabricated Ta 2 O 5 /polyimide nanolaminate structures consisting of nanoscale inorganic Ta 2 O 5 and organic polyimide layers. Tantalum ethoxide and water were used to deposit Ta 2 O 5 , and PMDA and hexane-1,6-diamine for the polyimide deposition.…”

Progress and future directions for atomic layer deposition and ALD-based chemistry

“…Combining ALD and MLD can also produce interesting organic-inorganic nanolaminate structures. 28 The key for future researchers will be to explore new uses for known hybrid organic-inorganic fi lms and discover new hybrid materials that provide even more unique functionality. For example, the zincones may have electrical conductivity because of their similarity to ZnO.…”

Studies on atomic layer deposition of IRMOF-8 thin films

“…A wide range of polymers and hybrid-materials have been deposited utilizing MLD, including polyimides, 15 polyamides, 16,17 alucones, 18,19 zincones, 19,20 and hybrid nanolaminates. 21 The series of isoreticular MOFs (IRMOF) is a classic example of MOFs. 1 It consists of cubic Zn 4 O(carboxylate) 6 compounds that are all derived from one of the most studied MOFs, MOF-5 (IRMOF-1).…”