We report the atomic layer deposition of titanium dioxide on carbon nanosheet templates and investigate the effects of post-deposition annealing in a helium environment using different characterization techniques. The crystallization of the titanium dioxide coating upon annealing is observed using in-situ X-ray diffraction. The (micro)-structural characterization of the films is carried out by scanning electron microscopy and advanced transmission electron microscopy techniques. Our study shows that the annealing of the atomic layer deposition processed and carbon nanosheets templated titanium dioxide layers in helium environment results in the formation of a porous, nanocrystalline and photocatalytically active titanium dioxide-carbon nanosheet composite film. Such composites are suitable for photocatalysis and dye-sensitized solar cells applications.KEYWORDS titanium dioxide, atomic layer deposition, transmission electron microscopy, photocatalysis, electron tomography.
ConclusionsThis study demonstrates the influence of annealing on ALD processed TiO 2 nanostructured films in an inert gas (helium) environment. The morphology of the film was visualized using conventional TEM imaging techniques, whereas the complex 3D structure of TiO 2 nanostructured films was revealed by HAADF-STEM electron tomography. The annealing was found to cause the ALD processed film to undergo a phase transformation from amorphous to anatase TiO 2 . The calcination resulted in highly crystalline TiO 2 nanostructures with a porous network and a large surface area, which are desirable properties for photocatalytic and photovoltaics applications. TEM characterization indicated that the removal of carbon nanosheets template is hindered, and thin, porous, nanocrystalline and photocatalytically active TiO 2 -carbon nanosheets composite material is produced.