2014
DOI: 10.1063/1.4905055
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Atomic layer epitaxy of Ruddlesden-Popper SrO(SrTiO3)n films by means of metalorganic aerosol deposition

Abstract: We report an atomic layer epitaxial growth of Ruddlesden-Popper (RP) thin films of SrO(SrTiO3)n (n = ∞, 2, 3, 4) by means of metalorganic aerosol deposition (MAD). The films are grown on SrTiO3(001) substrates by means of a sequential deposition of Sr-O/Ti-O2 atomic monolayers, monitored in-situ by optical ellipsometry. X-ray diffraction and transmission electron microscopy (TEM) reveal the RP structure with n = 2–4 in accordance with the growth recipe. RP defects, observed by TEM in a good correlation with th… Show more

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Cited by 39 publications
(44 citation statements)
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“…A SAED pattern forms a region with a lower density of defects in Figure 6b and shows that it can be indexed as Zr 2 Ni 7 in the [110] zone axis, which is confirmed by comparing it with the simulated [110] patterns, Figure 6e, using a structural model of Eshelman et al . [24]. However, SAED from regions with a higher density of defects, Figure 6b, shows a dense distribution of reflection and intensity streaks along the 0 kl rows.…”
Section: Resultsmentioning
confidence: 99%
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“…A SAED pattern forms a region with a lower density of defects in Figure 6b and shows that it can be indexed as Zr 2 Ni 7 in the [110] zone axis, which is confirmed by comparing it with the simulated [110] patterns, Figure 6e, using a structural model of Eshelman et al . [24]. However, SAED from regions with a higher density of defects, Figure 6b, shows a dense distribution of reflection and intensity streaks along the 0 kl rows.…”
Section: Resultsmentioning
confidence: 99%
“…These variations can be understood as the following: according to the structural model of Eshelman [24], the structural blocks shown in Figure 7a are very similar but not identical, thus the periodicity c = 1.2193 nm. In the analysis by Parthe and Lemair [33], by allowing small changes in the point positions of less than 0.5 nm, a unit-cell transformation can be made which leads to a smaller monoclinic unit cell with c = 0.6307 nm.…”
Section: Resultsmentioning
confidence: 99%
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“…Here we report the epitaxial growth of monoclinic Tb2CoMnO6/Nb:SrTiO3(100) thin film by using a metalorganic aerosol deposition (MAD) technique 21 . The established partial B-site disorder in the film is accompanied by a short range ordering of spins as manifested by the deviation from a standard Curie-Weiss law at T*~190 K, i.e.…”
Section: Introductionmentioning
confidence: 99%