2002
DOI: 10.1016/s0168-583x(01)01225-3
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Atomic mixing in thin film systems by swift heavy ions

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Cited by 56 publications
(12 citation statements)
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“…Such molten zones may give rise to interdiffusion effects in layered systems. Recently these atomic transport effects due to electronic energy deposition have attracted much interest and indeed it was found that especially in ceramic layer systems like oxides and nitrides, such ion beam mixing effects are present and can be regarded as to be due to transient interdiffusion in the molten ion track [575][576][577][578][579][580][581][582][583][584].…”
Section: Metal Oxidementioning
confidence: 99%
“…Such molten zones may give rise to interdiffusion effects in layered systems. Recently these atomic transport effects due to electronic energy deposition have attracted much interest and indeed it was found that especially in ceramic layer systems like oxides and nitrides, such ion beam mixing effects are present and can be regarded as to be due to transient interdiffusion in the molten ion track [575][576][577][578][579][580][581][582][583][584].…”
Section: Metal Oxidementioning
confidence: 99%
“…In the present case, there is possibility of increase in oxygen content with ion irradiation. The increase in oxygen content during ion irradiation is reported in several systems [20][21][22]. Although, the oxygen depletion is also reported in various metal oxide films under the high energy ion irradiations [13].…”
Section: Optical Studiesmentioning
confidence: 99%
“…Subsequently several researchers studied the alloy formation in various systems such as insulator/insulator [15,16], metal/semiconductor [17][18][19], metal/metal [20][21][22], etc. using SHI induced ion beam mixing.…”
Section: Introductionmentioning
confidence: 99%