2010
DOI: 10.1103/physrevb.81.100101
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Atomic-resolution chemical mapping using energy-dispersive x-ray spectroscopy

Abstract: We demonstrate atomic-resolution chemical mapping using energy-dispersive x-ray spectroscopy in scanning transmission electron microscopy. Theoretical simulations of the imaging process demonstrate that these images are directly interpretable. This is due to the fact that the effective ionization interaction is local and this is an incoherent mode of imaging.

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Cited by 198 publications
(152 citation statements)
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“…Conversely, X-ray energy-dispersive spectroscopy (EDS) only measures the elemental composition, and requires exposing a specimen to a vast amount of electrons in order to produce enough signal to extract atomic-resolution information. Nevertheless, some excellent highresolution EDS maps of small areas have been created, of materials such as oxides (Feng et al, 2016;Dycus et al, 2016;D'Alfonso et al 2010), semiconductors (Chu et al, 2010;Klenov and Zide, 2011) and magnetic alloys (Lu et al, 2014a). STEM-EELS is the ideal technique only for an ideal specimen; that is a thin, non-contaminating specimen with no carbon or SiN supports (as these elements would give huge background signals that complicate spectrum analysis).…”
Section: Introductionmentioning
confidence: 99%
“…Conversely, X-ray energy-dispersive spectroscopy (EDS) only measures the elemental composition, and requires exposing a specimen to a vast amount of electrons in order to produce enough signal to extract atomic-resolution information. Nevertheless, some excellent highresolution EDS maps of small areas have been created, of materials such as oxides (Feng et al, 2016;Dycus et al, 2016;D'Alfonso et al 2010), semiconductors (Chu et al, 2010;Klenov and Zide, 2011) and magnetic alloys (Lu et al, 2014a). STEM-EELS is the ideal technique only for an ideal specimen; that is a thin, non-contaminating specimen with no carbon or SiN supports (as these elements would give huge background signals that complicate spectrum analysis).…”
Section: Introductionmentioning
confidence: 99%
“…Consequently, using EELS spectrometer and EDS detector, the energy loss electrons and X-rays yielded by the interaction between electron beam and the probed species enable qualitative and quantitative element analysis [55].…”
Section: Eds and Eelsmentioning
confidence: 99%
“…So far, most of these efforts have been applied to materials such as perovskite oxides [1][2][3], e.g. SrTiO 3 , and compound semiconductors [4,5], which have well-known crystal structures with relatively large lattice spacings, that are also comparatively resistant to electronbeam irradiation.…”
mentioning
confidence: 99%
“…Significant improvement in the S/N ratio of EDS mapping can be achieved by lattice-averaging ( Fig.1), which compensates for reduction in X-ray count due to the selection of small electron probe and thin specimen, and also leads to an overall reduction of electron dose necessary for EDS mapping [6]. By choosing a thin TEM specimen, the EDS signal is localized to atomic columns [1,3,6, 7] and X-ray counts from individual atomic columns can be approximated by a Gaussian distribution. The width of the Gaussian peak is then effectively determined by convoluting the electron probe with the effective EDS local ionization potential, leading to a spatial resolution of better than 2.0 Å [6].…”
mentioning
confidence: 99%