2022
DOI: 10.1038/s41467-022-32189-0
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Atomic-scale 3D imaging of individual dopant atoms in an oxide semiconductor

Abstract: The physical properties of semiconductors are controlled by chemical doping. In oxide semiconductors, small variations in the density of dopant atoms can completely change the local electric and magnetic responses caused by their strongly correlated electrons. In lightly doped systems, however, such variations are difficult to determine as quantitative 3D imaging of individual dopant atoms is a major challenge. We apply atom probe tomography to resolve the atomic sites that donors occupy in the small band gap … Show more

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Cited by 7 publications
(6 citation statements)
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“…The parameters were optimized to ensure that the interfaces appear flat and not curved. [ 53 ] The peak at 16 Da in the mass spectrum (see Figure S4, Supporting Information) could correspond to either O + or O 2 2+ . Following the discussion in refs.…”
Section: Methodsmentioning
confidence: 99%
“…The parameters were optimized to ensure that the interfaces appear flat and not curved. [ 53 ] The peak at 16 Da in the mass spectrum (see Figure S4, Supporting Information) could correspond to either O + or O 2 2+ . Following the discussion in refs.…”
Section: Methodsmentioning
confidence: 99%
“…Furthermore, in the doped ferroelectric hexagonal manganite Er­(Mn,Ti)­O 3 it was possible to map the position of the Ti dopants despite their extremely low concentration of 0.04 at. % . Understanding the distribution of these dopants is crucial to model their transport properties for further development of domain-wall electronic devices …”
Section: Ferroelectricity In the Ultrathin Regime: Advanced Character...mentioning
confidence: 99%
“…%. 57 Understanding the distribution of these dopants is crucial to model their transport properties for further development of domain-wall electronic devices. 57 3.2.…”
Section: Atom Probe Tomographymentioning
confidence: 99%
See 1 more Smart Citation
“…The distribution of dopants, especially the clustering of dopants, significantly affects the performance of semiconductors. [1][2][3][4][5][6][7][8][9][10][11][12] Although the clustering of dopant is common in semiconductors, the fundamental understanding of the origin of the clustering and the effective strategy to modulate it is still lacking.…”
Section: Introductionmentioning
confidence: 99%