Attenuation and trapping of acoustic energy in composite microwave resonators based on YAG single crystals

Alekseev, S. G.; Mansfeld, G.D.; Polzikova, N. I.; Kotelyanskiǐ, I. M.

doi:10.1134/s1063771007040069

Cited by 14 publications

(13 citation statements)

References 2 publications

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“…Figure 7 shows the results of microwave measure ments for resonator 1b near f p ≈ 4.5 GHz. Symbols Z 11 and Z 11e mark the absolute values of the total and pure impedances of the test device. The quantity S 11 (LinMag mode) (Fig.…”

Section: Experimental Investigationsmentioning

confidence: 99%

“…Then, the value of the pure impedance |Z 11e | ( Fig. 7c) 11 ' Z processed using an E5071C analyzer. The signal phase variation is illustrated in Fig.…”

Section: Experimental Investigationsmentioning

confidence: 99%

“…HBARs are formed on substrates made of single crystalline or fused quartz, silicon [5], sapphire [5,6], yttrium aluminum garnet (YAG) [7], and diamond [8]. Propagation of ultrasound in HBARs was theoretically investigated in [7,[9][10][11][12].…”

Section: Introductionmentioning

confidence: 99%

“…Calculation of the effective electromechanical coupling coefficient (EMCC) using the relation(11) 8. Determination of the motional capacitance of the HBAR using the…”

mentioning

confidence: 99%

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Study of high-overtone bulk acoustic resonators based on the Me1/AlN/Me2/(100) diamond piezoelectric layered structure

et al. 2015

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The Me1/AlN/Me2/(100) diamond structure has been theoretically analyzed and experimentally investigated in the range 0.5-10 GHz using high overtone bulk acoustic resonators with different electrodes topologies based on the Al/AlN/Mo/(100) diamond structure. The maximum quality parameter Q × f ≈ 10 14 Hz was obtained at f = 9.5 GHz. The layered structure has been analyzed using the developed HBAR software v. 2.3. It is demonstrated that the features in the frequency dependences of the parameters of such resonators are related to the behavior of a loaded thin film piezoelectric transducer. The calculation results are in good agree ment with the experiment. The frequency dependences of the equivalent parameters of the resonators have been calculated. It is shown that the synthetic type IIa diamond single crystal in combination with aluminum nitride is promising for implementation of high Q acoustoelectronic microwave devices.

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Section: Experimental Investigationsmentioning

confidence: 99%

“…Then, the value of the pure impedance |Z 11e | ( Fig. 7c) 11 ' Z processed using an E5071C analyzer. The signal phase variation is illustrated in Fig.…”

Section: Experimental Investigationsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

“…Calculation of the effective electromechanical coupling coefficient (EMCC) using the relation(11) 8. Determination of the motional capacitance of the HBAR using the…”

mentioning

confidence: 99%

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Study of high-overtone bulk acoustic resonators based on the Me1/AlN/Me2/(100) diamond piezoelectric layered structure

et al. 2015

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“…This causes the waves to leave the active resonator region and dissipate either in the device substrate or in the region surrounding the device laterally [9]. For a single reflection act and lateral roughness scale much smaller than the wavelength, the attenuation coefficient can be approximated in dB as [17]:…”

Section: D) Baw-smr Q-factormentioning

confidence: 99%

Enhanced tunable performance of high Q-factor Ba_xSr_1−xTiO₃ film bulk acoustic wave resonators

Vorobiev

Gevorgian

2013

Int. J. Microw. Wireless Technol.

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Emerging intrinsically tunable film bulk acoustic wave(BAW) resonators allow the development of new generation reconfigurable and agile microwave circuits. In this paper, we demonstrate the enhancement of tunable performance of the high Q-factor BaxSr1−xTiO3 BAW – solidly mounted resonators (BAW–SMR) by varying Ba concentration. The Ba0.5Sr0.5TiO3 BAW–SMR reveal tunability of series resonance frequency up to 2.4%, electromechanical coupling coefficient up to 7.5% and rather high Q-factor, up to 250 at 5.3 GHz. Correlations between the measured electroacoustic parameters are analyzed using the theory of dc field-induced piezoelectric effect in paraelectric phase ferroelectrics. Higher coupling coefficient and tunability of resonance frequency of the Ba0.5Sr0.5TiO3 BAW–SMR are associated with higher tunability of permittivity. Strong anisotropy in field-induced piezoelectric effect is predicted with highest coupling coefficient in (001) direction of the BaxSr1−xTiO3 films. It is also shown that the tunability of series resonance frequency of Ba0.5Sr0.5TiO3 BAW–SMR is limited by relatively high and negative nonlinear electrostriction coefficient which is found to be m ≈ −4·1010 m/F. The BAW–SMR Q-factor is limited significantly by extrinsic acoustic loss associated with wave scattering at reflection from relatively rough top interface. The results of analysis show possible ways of further improvement of the performance of tunable BAW–SMR.

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Peculiarities of energy trapping of the UHF elastic waves in diamond-based piezoelectric layered structure. I. Waveguide criterion

2018

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Attenuation and trapping of acoustic energy in composite microwave resonators based on YAG single crystals

Cited by 14 publications

References 2 publications

Study of high-overtone bulk acoustic resonators based on the Me1/AlN/Me2/(100) diamond piezoelectric layered structure

Study of high-overtone bulk acoustic resonators based on the Me1/AlN/Me2/(100) diamond piezoelectric layered structure

Enhanced tunable performance of high Q-factor Ba_xSr_1−xTiO₃ film bulk acoustic wave resonators

Peculiarities of energy trapping of the UHF elastic waves in diamond-based piezoelectric layered structure. I. Waveguide criterion

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Attenuation and trapping of acoustic energy in composite microwave resonators based on YAG single crystals

Cited by 14 publications

References 2 publications

Study of high-overtone bulk acoustic resonators based on the Me1/AlN/Me2/(100) diamond piezoelectric layered structure

Study of high-overtone bulk acoustic resonators based on the Me1/AlN/Me2/(100) diamond piezoelectric layered structure

Enhanced tunable performance of high Q-factor BaxSr1−xTiO3 film bulk acoustic wave resonators

Peculiarities of energy trapping of the UHF elastic waves in diamond-based piezoelectric layered structure. I. Waveguide criterion

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Enhanced tunable performance of high Q-factor Ba_xSr_1−xTiO₃ film bulk acoustic wave resonators