1996
DOI: 10.1016/0040-6090(95)08063-5
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Auger lineshape analysis of porous silicon: experiment and theory

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Cited by 12 publications
(4 citation statements)
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“…In spite of these limitations, some previous works have shown the power of AES to investigate the chemistry of the porous silicon surface. 1,2 In particular, these works demonstrate the role of Si-H bonding in the change of the Si L 23 VV Auger spectrum. Therefore it seems of benefit to extend the AES lineshape analysis to porous silicon impregnated with different materials, which has attracted great interest owing to its possible integration in different micro and optoelectronic devices.…”
Section: Introductionmentioning
confidence: 97%
“…In spite of these limitations, some previous works have shown the power of AES to investigate the chemistry of the porous silicon surface. 1,2 In particular, these works demonstrate the role of Si-H bonding in the change of the Si L 23 VV Auger spectrum. Therefore it seems of benefit to extend the AES lineshape analysis to porous silicon impregnated with different materials, which has attracted great interest owing to its possible integration in different micro and optoelectronic devices.…”
Section: Introductionmentioning
confidence: 97%
“…Several techniques for determining the elemental composition, depth profile or surface morphology have been used. Rutherford back-scattering spectrometry (RBS), 1 accelerator mass spectrometry (AMS), 2 X-ray photoelectron spectroscopy (XPS), 3 Auger electron spectroscopy (AES), 4 scanning tunnelling microscopy (STM), 5 atomic force microscopy (AFM), 6 Raman spectroscopy 7 and infrared spectroscopy (IR) 8 have been applied satisfactorily as surface characterisation tools. Laserna and co-workers have proposed the use of laser-induced breakdown spectrometry (LIBS) for the surface analysis with in-depth and lateral resolution of different samples of interest in industrial and environmental fields, such as photogalvanic cells, 9,10 silicon wafers, 11,12 coated steels, [13][14][15][16] photovoltaic solar cells, 17 catalytic converters 18 and pigments.…”
Section: Introductionmentioning
confidence: 99%
“…Several techniques with distinct capabilities to determine the elemental composition, depth profile or surface morphology of these materials have been used so far. Rutherford backscattering spectrometry (RBS), 4 accelerator mass spectrometry (AMS), 5 x-ray photoelectron spectroscopy (XPS), 6 Auger electron spectroscopy (AES), 7 scanning tunnelling microscopy (STM), 8 atomic force microscopy (AFM), 9 Raman spectroscopy 10 and infrared spectroscopy (IR) 11 have appeared as satisfactory surface characterization tools. Recently, Laserna and co-workers have proposed the use of laser-induced breakdown spectrometry (LIBS) for surface analysis with in-depth and lateral resolution of distinct samples of interest in the industrial or environmental fields, such as photogalvanic cells, 12 silicon wafers, 13,14 coated steels, 15 photovoltaic solar cells 16 and catalytic converters.…”
Section: Introductionmentioning
confidence: 99%