Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage

Rocha, Licinio; Dias, Rosana A.; Cretu, Edmond; Mol, L.; Wolffenbuttel, R.F.

doi:10.1007/s00542-011-1252-8

Cited by 29 publications

(13 citation statements)

References 16 publications

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“…The Kalman Filter of state equation and measurement equation are as follows respectively: (5) State vector covariance matrix prediction:…”

Section: A the Principle Of Kalman Filtermentioning

confidence: 99%

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Calibration of MEMS Accelerometer Based on Kalman Filter and the Improved Six Position Method

Liu¹,

Gaolin²,

Lu³

et al. 2016

JCM

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Abstract-The measurement precision of Micro ElectronicMechanical System (MEMS) accelerometer are influenced by zero drift, scale factor and installation error. In order to increase the measurement accuracy of the MEMS accelerometer, an improved calibration method is proposed on the basis of traditional six position method. The raw measurements of the MEMS accelerometer not divided by the scale factor are filtered by the Kalman Filter first, then the filtered values of six positions are calibrated to obtain the error model of MEMS accelerometer. The error model is verified by the experiments, and the results show that the measurement precision of the calibrated MEMS accelerometer is increased to 0.0066 m/s 2 from the uncalibrated 0.2646 m/s 2 , and the measurement precision of pitch calculated by the calibrated MEMS accelerometer is increased to 0.145 degree. It has been verified that error model based on Kalman Filter and improved six location method are feasible and effective. Therefore, this error model can be very valuable in promoting MEMS accelerometer to be widely used in engineering field.

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“…The Kalman Filter of state equation and measurement equation are as follows respectively: (5) State vector covariance matrix prediction:…”

Section: A the Principle Of Kalman Filtermentioning

confidence: 99%

“…With(13), Y axis' corresponding coefficients of MEMS accelerometer in the calibration model are obtained, as follows.Journal of Communications Vol 11,No. 5…”

mentioning

confidence: 99%

Calibration of MEMS Accelerometer Based on Kalman Filter and the Improved Six Position Method

Liu¹,

Gaolin²,

Lu³

et al. 2016

JCM

View full text Add to dashboard Cite

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“…The last decade has witnessed an admirable surge for the introduction of diverse general characterizing and testing methods for MEMS devices, some of which are shown in Table 1 [24][25][26][27][28][29][30][31][32][33][34][35][36][37][38][39][40][41]. These methods are categorized into two main groups: destructive and non-destructive testing approaches.…”

Section: Introductionmentioning

confidence: 99%

A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices

2020

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This research explores a new ATE (Automatic Testing Equipment) method for Micro Electro Mechanical Systems (MEMS) devices. In this method, microscale aerodynamic drag force is generated on a movable part of a MEMS sensor from a micronozzle hole located a specific distance above the chip that will result in a measurable change in output. This approach has the potential to be generalized for the characterization of every MEMS device in mass production lines to test the functionality of devices rapidly and characterize important mechanical properties. The most important testing properties include the simultaneous application of controllable and non-invasive manipulative force, a single handler for multi-sensor, and non-contact characterization, which are relatively difficult to find with other contemporary approaches. Here we propose a custom-made sensing platform consisting of a microcantilever array interconnected to a data acquisition device to read the capacitive effects of each cantilever’s deflection caused by air drag force. This platform allows us to empirically prove the functionality and applicability of the proposed characterization method using airflow force stimuli. The results, stimulatingly, exhibited that air force from a hole of 5 µm radii located 25 µm above a 200 × 200 µm2 surface could be focused on a circular spot with radii of approximately 5 µm with surface sweep accuracy of <8 µm. This micro-size airflow jet can be specifically designed to apply airflow force on the MEMS movable component surface. Furthermore, it was shown that the generated air force range could be controlled from 20 nN to 60 nN, approximately, with a linear dependency on airflow ranging from 5 m/s to 20 m/s, which is from a 5 µm radius microhole air jet placed 400 µm above the chip. In this case-study chip, for a microcantilever with a length of 400 µm, the capacitance curve increased linearly from 28.2 pF to 30.5 pF with airflow variation from 5 m/s to 21 m/s from a hole. The resultant curve is representative of a standard curve for testing of the further similar die. Based on these results, this paper paves the way towards the development of a new non-contact, non-invasive, easy-to-operate, reliable, and relatively cheap air-based method for characterizing and testing MEMS sensors.

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“…The increase in their popularity helped with reducing the cost and complexity of fabrication as well as packaging techniques with high-performance readout electronics [7].…”

mentioning

confidence: 99%

“…Note that none of the preceding techniques can be used as an alternative calibration method since they can only measure electrical sensitivity. Although several pre-defined voltages can be applied to generate electrostatic forces that can be used to calibrate the system, in theory, too many tolerances prevent straightforward implementation of such a principle [7].…”

mentioning

confidence: 99%

An Electrical-Stimulus-Only BIST IC for Capacitive MEMS Accelerometer Sensitivity Characterization

et al. 2017

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Testing and calibration constitute a significant part of the overall manufacturing cost of microelectromechanical system (MEMS) devices. Developing a low-cost testing and calibration scheme applicable at the user side that ensures the continuous reliability and accuracy is a crucial need. The main purpose of testing is to eliminate defective devices and to verify the qualifications of a product is met. The calibration process for capacitive MEMS devices, for the most part, entails the determination of the mechanical sensitivity.In this work, a physical-stimulus-free built-in-self-test (BIST) integrated circuit (IC) design characterizing the sensitivity of capacitive MEMS accelerometers is presented. The BIST circuity can extract the amplitude and phase response of the acceleration sensor's mechanics under electrical excitation within 0.55% of error with respect to its mechanical sensitivity under the physical stimulus. Sensitivity characterization is performed using a low computation complexity multivariate linear regression model. The BIST circuitry maximizes the use of existing analog and mixed-signal readout signal chain and the host processor core, without the need for computationally expensive Fast Fourier Transform (FFT)-based approaches. The BIST IC is designed and fabricated using the 0.18-µm CMOS technology. The sensor analog front-end and BIST circuitry are integrated with a three-axis, low-g capacitive MEMS accelerometer in a single hermetically sealed package.The BIST circuitry occupies 0.3 mm 2 with a total readout IC area of 1.0 mm 2 and consumes 8.9 mW during self-test operation.

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Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage

Cited by 29 publications

References 16 publications

Calibration of MEMS Accelerometer Based on Kalman Filter and the Improved Six Position Method

Calibration of MEMS Accelerometer Based on Kalman Filter and the Improved Six Position Method

A New Non-Invasive Air-Based Actuator for Characterizing and Testing MEMS Devices

An Electrical-Stimulus-Only BIST IC for Capacitive MEMS Accelerometer Sensitivity Characterization

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