We studied Penning ionization of the CF2Cl2 molecule by neon and helium metastable atoms. In the case of the neon ionizing particle, we measured the electron kinetic energy as well as mass spectra; for helium metastable atoms, only the mass spectrum was recorded. We, therefore, obtained the branching ratios for the heavy charged particles produced in both interactions. In this report we will discuss the mechanism involved in the production of metastable halogen atoms in the dielectric barrier discharge further to the use of rare gases/CF2Cl2 mixtures. We show that this process needs a two-stage reaction. Ground state free halogen atoms are formed over the first stage by Penning ionization, charge transfer, dissociate excitation and ionization. Therefore, metastable halogen atoms can be produced by excitation transfer process in the second stage through interaction with metastable rare gas atoms.