Automated data monitoring of MEMS cleanroom parametric requirements

Abstract

<p>Cleanroom parameters such as temperature, relative humidity and particle count are vital in maintaining cleanliness. People and machines working inside the cleanroom are main contributors for the sudden changes of the separameters. Measurements and monitoring of these parameters are therefore necessary to reduce rejects and downtime in the production of micro-electro-mechanical systems (MEMS). This paper presents a method of developmentof an automated data monitoring of MEMS cleanroom parametric requirements. The prototype developed uses DHT11 sensor and Sharp dust sensor for measuring the temperature, humidity and particle count respectively which are displayed in an LCD display. These parameters are recorded through a data logger for analysis and control. Additionally, agraphical user interface was also developed using visual studio for the working personnel and for supervisory monitoring and control. As a result, the possible quality compromise in the production of MEMS is detected when the monitored parameters are beyond the range.</p>

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“…The email notification may include images or a short video captured by the camera. This research will use a GSM module to send and receive SMS messages, and for the internet connection, ADSL or fiber Wi-Fi link will be used, and will also add the USB 3G/4G module, which offers the advantage of connecting to the mobile internet through the 3G/4G network, several sensors such as the temperature and humidity sensor DHT11 [14], [15], and the soil moisture sensor [16] EK1099 will be added. All sensors and modules will be connected to the control center based on the Raspberry-Pi board.…”