Automated phase-measuring profilometry using defocused projection of a Ronchi grating

Su, Xin; Zhou, Wei; Bally, Gert von; Vukičević, Dalibor

doi:10.1016/0030-4018(92)90606-r

Cited by 263 publications

(101 citation statements)

References 7 publications

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“…Furthermore, a simplified calculation of the relative height can be directly expressed as the production of a coefficient and the phase when the stand off distance S is much larger than the relative height h. (Su et al, 1992) …”

Section: Phase-height Mapping Strategymentioning

confidence: 99%

Active Stereo Vision for 3D Profile Measurement

Xu¹

2011

Advances in Stereo Vision

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Section: Phase-height Mapping Strategymentioning

confidence: 99%

Active Stereo Vision for 3D Profile Measurement

Xu¹

2011

Advances in Stereo Vision

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“…In the case of white light, interference occurs only when the optical path difference (OPD) between the objective and reference beams is nearly the same (within the coherence length of the light source) so by varying one of the arms we can measure the surface roughness, small height variations and thickness of the microstructures. various schemes in WLI, such as, vertical scanning interferometry (VSI) [16,17], phase shifting interferometry (PSI) [18][19][20][21][22], fringe projection method [23][24][25][26][27], Fourier profilometry [27,28], confocal microscope [29]. In the aforementioned methods Linnik, Michelson and Mirau type interferometric objectives are used [12][13][14].…”

Section: Introductionmentioning

confidence: 99%

Single Shot White Light Interference Microscopy for 3D Surface Profilometry Using Single Chip Color Camera

Srivastava

Inam²,

Kumar³

et al. 2016

Journal of the Optical Society of Korea

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We present a single shot low coherence white light Hilbert phase microscopy (WL-HPM) for quantitative phase imaging of Si opto-electronic devices, i.e., Si integrated circuits (Si-ICs) and Si solar cells. White light interferograms were recorded by a color CCD camera and the interferogram is decomposed into the three colors red, green and blue. Spatial carrier frequency of the WL interferogram was increased sufficiently by means of introducing a tilt in the interferometer. Hilbert transform fringe analysis was used to reconstruct the phase map for red, green and blue colors from the single interferogram. 3D step height map of Si-ICs and Si solar cells was reconstructed at multiple wavelengths from a single interferogram. Experimental results were compared with Atomic Force Microscopy and they were found to be close to each other. The present technique is non-contact, full-field and fast for the determination of surface roughness variation and morphological features of the objects at multiple wavelengths.

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“…In a representative system of fringe projection profilometry, the structured fringe patterns are projected on the object using a DMD projector and the distorted fringes are recorded by a charge coupled device (CCD). Many methods such as PMP and FTP apply to the calculation of the phase information of the fringe pattern [10][11][12]. Compared with FTP, although more images are needed, the result of PMP is more accurate since the process of filtering in FTP is avoided.…”

Section: Introductionmentioning

confidence: 99%

The application of multi-frequency fringe projection profilometry on the measurement of biological tissues

Jiang

Jia

et al. 2015

BME

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Abstract.A volume of research has been performed on the optical surface profilometry in the field of biomedicine and the optical system with the phase-measuring method becomes the main emphasis of the research. In this research, a brand new fringe projection profilometry with multiple frequencies is described for measuring the biological tissue. A pork liver, as an object, is regarded as a human organ and a DMD projector is used to generate the multi-frequency fringe patterns. The wrapped phase maps are obtained by means of the five-step phase shifting method and calculated via a peak searching algorithm in which the process of measuring the point on the surface of the object is independent so that the step of unwrapping the phase can be avoided. The final results given are acceptable which confirm this method and suggest its enormous potential for the biomedical measurements.

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Automated phase-measuring profilometry using defocused projection of a Ronchi grating

Cited by 263 publications

References 7 publications

Active Stereo Vision for 3D Profile Measurement

Active Stereo Vision for 3D Profile Measurement

Single Shot White Light Interference Microscopy for 3D Surface Profilometry Using Single Chip Color Camera

The application of multi-frequency fringe projection profilometry on the measurement of biological tissues

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