Micro-Nanomechatronics and Human Science, 2004 and the Fourth Symposium Micro-Nanomechatronics for Information-Based Society, 2
DOI: 10.1109/mhs.2004.1421270
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Automatic fabrication system for plastic microfluidic chips

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Cited by 2 publications
(1 citation statement)
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“…Micro-channel which as the core structure of the microfluidic chip directly determines the application scope of the chip. Micro-channel is often manufactured by using molding or pressing [1]. Nowadays, micro-channel mold is fabricated mainly by silicon dry and wet etching technology, photoresist technology and lithography electroforming injection of Ni mold (LIGA) or ultraviolet lithography electroforming injection (UV-LIGA)[2~4], but these techniques have very high requirements for equipment, complex production process, a longer period (more than 10 h) and high costs.…”
Section: Introductionmentioning
confidence: 99%
“…Micro-channel which as the core structure of the microfluidic chip directly determines the application scope of the chip. Micro-channel is often manufactured by using molding or pressing [1]. Nowadays, micro-channel mold is fabricated mainly by silicon dry and wet etching technology, photoresist technology and lithography electroforming injection of Ni mold (LIGA) or ultraviolet lithography electroforming injection (UV-LIGA)[2~4], but these techniques have very high requirements for equipment, complex production process, a longer period (more than 10 h) and high costs.…”
Section: Introductionmentioning
confidence: 99%