Automatic Fault Detection in Rails of Overhead Transport Systems for Semiconductor Fabs

Zhakov, Artem; Zhu, Hailong; Siegel, Armin; Rank, Sebastian; Schmidt, Thorsten; Fienhold, Lars; Hummel, Stefan

doi:10.1109/asmc.2019.8791756

Cited by 4 publications

(2 citation statements)

References 6 publications

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“…Because of this, the friction between the rail and mover roller is inconsistent and varies during operation [7][8][9]. Some custom guide rails can be designed separately according to user needs [10][11][12]. These rails, though effective, are costly.…”

Section: Introductionmentioning

confidence: 99%

Design and Position Control of Overhang-Type Rail Mover Using Dual BLAC Motor

Cho

Lee

2021

Energies

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This paper presents the design and position control scheme of an overhang-type rail mover system driven by a dual Brushless AC (BLAC) motor with a simple Hall position sensor inside each motor. The overhang-type roller is chosen to reduce the slip between the roller and rail surface due to gravity. The BLAC motors are used to provide smooth translation along the rail and effective turning. Imbalances on any part of the motor and the simplicity of the Hall position sensor can create additional disturbance load, unsteady movement, and position errors. To reduce the sudden moving position error between the two motors, a balancing compensator with a Proportional-Differential (PD) position controller, which is based on the instantaneous speed and position trajectories, is presented. Furthermore, speed and position reference models are designed to compensate for the low Hall sensor resolution in the low-speed range. Therefore, steady-state position errors can then be regulated simply by using the instantaneous speed and position information. Experiments were performed to verify the viability of the proposed system and control. The results show a significant improvement in roller translation along the rail and stopping position accuracy.

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Section: Introductionmentioning

confidence: 99%

Design and Position Control of Overhang-Type Rail Mover Using Dual BLAC Motor

Cho

Lee

2021

Energies

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“…The system configuration and control vary according to the target application. For semiconductor factories, a more precise position control system by implementing an accurate linear position sensor is adopted in the rail traction system [4,5]. However, the installation of this system is very complex and the cost is too expensive to be implemented in most unmanned facilities.…”

Section: Introductionmentioning

confidence: 99%

Motion control of the rail traction system by dual brushless AC motors using a disturbance observer

Lee

2021

IET Electric Power Appl

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This study presents an accurate motion control scheme using a modified non-linear disturbance torque observer for a rail traction system driven by a dual brushless AC (BLAC) motor. The target application has two BLAC motors mounted on the top surface of the rail. The mover translation along the rail is handled solely by the traction motors without any external sensor. In the low-speed range, however, the conventional disturbance torque observer is unstable due to the resolution of the Hall sensor and speed detection delay. To solve this instability problem, a simple weight function with the synchronisation of torque current and the delayed speed feedback is added to the proposed torque observer. This way, zero output can be created in the selected speed region for stabilisation and torque current can be compensated. Furthermore, simple balance error compensation to synchronise both motors is added to the proposed speed and position model reference adaptive control scheme. The experiments were performed to verify the proposed control method. The results show advanced performance with reduced position and balance errors between the two BLAC motors and an improved overall control performance of the rail mover.This is an open access article under the terms of the Creative Commons Attribution-NonCommercial-NoDerivs License, which permits use and distribution in any medium, provided the original work is properly cited, the use is non-commercial and no modifications or adaptations are made.

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