Automatic rotating element ellipsometers: Calibration, operation, and real-time applications

Abstract

Articles you may be interested inReal-time calibration of a feedback trap Rev. Sci. Instrum. 85, 095102 (2014); 10.1063/1.4894383 Real-time measurement of toroidal rotation (abstract) Rev. Sci. Instrum. 72, 966 (2001); 10.1063/1.1323495 Realtime space materials degradation monitor using an ellipsometer AIP Conf.rotating analyzer ellipsometer, on the other hand, is the best suited to applications in which the primary requirement is accurate spectroscopic measurements over a wide range of photon energy. The reason is that this ellipsometer, when used without a compensator, is achromatic, requiring no spectral calibration in zero order (see Sec. IV A 1). The use Ellipsometry 2031 This article is copyrighted as indicated in the article. Reuse of AIP content is subject to the terms at: http://scitationnew.aip.org/termsconditions. Downloaded to IP:165.190.89.

Invited Article: An integrated mid-infrared, far-infrared, and terahertz optical Hall effect instrument

“…47 (i) rotating analyzer ellipsometers (RAE) 6,47,65,66 in polarizer-sample-rotating-analyzer (P SA R ) or rotating-polarizer-sample-analyzer (P R SA) configuration, capable to measure the upper left 3 × 3 block of the Mueller matrix; (ii) rotating compensators ellipsometers (RCE) 47,65,[67][68][69][70] in polarizer-samplerotating-compensator-analyzer (P SC R A) or polarizerrotating-compensator-sample-analyzer (P C R SA) configuration, capable to measure the upper left 3 × 4 or 4 × 3 block of the Mueller matrix, respectively.…”

Non-destructive evaluation in manufacturing using spectroscopic ellipsometry

“…We've studied optical constants at high temperatures, surface oxide formation and sublimation, surface roughness, crystal growth, and film deposition. Considerable in situ work has been done by other groups as well, as reviewed by Collins et al [13].…”

Quantifying the accuracy of ellipsometer systems

“…To avoid the pitfalls of the Ψ-∆ representation, some authors have reported and analyzed ellipsometric measurements from rotating polarizer or analyzer ellipsometers in terms of the measured normalized Fourier coefficients α and β [6], as opposed to calculating Ψ and ∆ from α and β using the non-linear transforms shown in equation (2) [7]. However, Fourier coefficient α and β values are only applicable to rotating polarizer or analyzer ellipsometer configurations.…”