Autonomous MEMS Inclinometer

Alves, Filipe; Dias, Rosana A.; Cabral, Jorge; Rocha, Licinio

doi:10.1007/978-3-642-31368-4_4

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Cited by 3 publications

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Three-Dimensional Anisotropic Metamaterials as Triaxial Optical Inclinometers

Agarwal

Liu

Joung

et al. 2017

Sci Rep

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Split-ring resonators (SRRs) present an attractive avenue for the development of micro/nano scale inclinometers for applications like medical microbots, military hardware, and nanosatellite systems. However, the 180° isotropy of their two-dimensional structure presents a major hurdle. In this paper, we present the design of a three-dimensional (3D) anisotropic SRR functioning as a microscale inclinometer enabling it to remotely sense rotations from 0° to 360° along all three axes (X, Y, and Z), by employing the geometric property of a 3D structure. The completely polymeric composition of the cubic structure renders it transparent to the Terahertz (THz) light, providing a transmission response of the tilted SRRs patterned on its surface that is free of any distortion, coupling, and does not converge to a single point for two different angular positions. Fabrication, simulation, and measurement data have been presented to demonstrate the superior performance of the 3D micro devices.

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