“…While semiconductor avalanche photodiodes (APDs) can be more compact, lower cost and more rugged than the commonly used photomultiplier tubes (PMTs), commercially available devices such as silicon (Si) single photon counting APDs have poor DUV single photon detection efficiency. Aluminum gallium nitride (Al x Ga 1-x N) photodetectors can take advantage of a sharp and tunable direct band gap to achieve high external quantum efficiency (2,3), and avalanche multiplication in Al x Ga 1-x N based p-i-n diodes has been reported (2,4,5). However, this approach is limited by the difficulty in doping high AlN mole fraction alloys p-type, and a very large breakdown electric field for high AlN mole fraction that implies higher voltage operation and greater susceptibility to dark current associated with defects in the material.…”