AZO Embedded Interdigitated Electrodes for Monitoring Stimuli Responsive Materials

Abstract

A combination of atomic layer deposition and photolithography is applied to fabricate interdigitated electrodes of aluminum-doped zinc oxide embedded in polyethylene terephthalate substrates. Various designs with different gap to widths ratios are realized and important characteristics of the electrodes, including thickness, surface roughness, and electrical properties with different ZnO:Al 2 O 3 ratios are studied. Oxygen plasma is applied to etch the polyethylene terephthalate surface and to embed the electrodes, a methodology which is a breakthrough toward ultimately thin devices fabrication. Moreover, the influence of oxygen plasma on the electrical properties of aluminum-doped zinc oxide is analyzed in more detail. Electrochemical impedance spectroscopy studies of two different stimuli responsive ionogels are performed using the fabricated electrodes. The results show the suitability of the use of the fabricated electrodes to monitor changes in ion motion and morphology of stimuli responsive materials. These electrodes and the process of characterization of the ionogels presented could be implemented to monitor electrochemical changes in real applications such as protective coatings.

Investigation on Transparent, Conductive ZnO:Al Films Deposited by Atomic Layer Deposition Process

“…Al-doped ZnO (AZO) films are regarded as the successor of ITO films because of their extremely low cost as well as their comparable transmittance and resistivity with ITO films [ 11 ]. Magnetron sputtering is a commonly used process to deposit AZO films.…”

“…Magnetron sputtering is a commonly used process to deposit AZO films. So far, many articles on sputtering-deposited AZO films and correspondingly application examples have been reported [ 11 , 12 , 13 , 14 ]. However, the sputtering process suffers from the distinct disadvantages of high-vacuum background pressure, surface damage of pre-deposited films, worse repeatability, and film composition limitations [ 15 , 16 ].…”

Electrical and electrochemical properties of imidazolium and phosphonium-based pNIPAAM ionogels

“…[12] In addition, a better understanding of the actuation behavior of the IOs was provided with repeated drying and swelling cycles employing either gold or AZO-based interdigitated electrodes. [13] In addition, the quasisolid nature of these electrolytes makes them a suitable alternative to circumvent the current problems derived from the use of liquid electrolytes in several applications such as gas sensors [14,15], supercapacitors, batteries and solar cells. [16] Regarding to supercapacitors, those commercially available are composed of two activated carbon electrodes and a porous separator soaked by a liquid electrolyte.…”

Microfluidic chip with pillar arrays for controlled production and observation of lipid membrane nanotubes

“…The production of DCA IO pillar microarrays was performed by spreading a 10 μm layer of prepolymer over a functionalized coverglass followed by exposure to different UV doses of 365 nm wavelength by contact photolithography (ESI † Methods). The prepolymer IO solution has a monomer (NIPAAm), a photoinitiator (DMPA), a crosslinker (mBAAm), and an ionic liquid (DCA) [16][17][18] mixed at a fixed molar ratio (ESI † Methods). Importantly, the ionic liquid used during the prepolymer preparation may act as a lipid membrane solvent.…”