2007
DOI: 10.1002/ppap.200700015
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Diagnostics of SiOx‐Containing Layers Deposited on Powder Particles by Dielectric Barrier Discharge

Abstract: We report on the analysis of the composition and internal structure of SiOx layers deposited on powder particles by using HMDSO as monomer, different oxygen admixtures in argon, and a dielectric barrier surface discharge under atmospheric pressure. Composition and structure of the deposited layers with special regard to silicon, carbon, and hydrocarbon bonding were studied by FTIR and XPS measurements and compared with previous investigations from the literature. For correlation of the layer composition and th… Show more

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Cited by 39 publications
(20 citation statements)
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“…For the treatment of cells with DBD plasma, 1×10 6 cells were plated on 60 mm diameter Petri dishes in 4 ml of RPMI 1640, 8% FCS. The cells were treated in suspension with surface DBD plasma and air as process gas (DBD/air plasma), based on a procedure described elsewhere (Hähnel et al, 2007, 2010; Oehmigen et al, 2010). A schematic representation of the surface DBD is shown in Figure 1.…”
Section: Methodsmentioning
confidence: 99%
“…For the treatment of cells with DBD plasma, 1×10 6 cells were plated on 60 mm diameter Petri dishes in 4 ml of RPMI 1640, 8% FCS. The cells were treated in suspension with surface DBD plasma and air as process gas (DBD/air plasma), based on a procedure described elsewhere (Hähnel et al, 2007, 2010; Oehmigen et al, 2010). A schematic representation of the surface DBD is shown in Figure 1.…”
Section: Methodsmentioning
confidence: 99%
“…The cells were treated in suspension with surface DBD plasma at atmospheric pressure and air or argon as process gas based on a setup described elsewhere (Hähnel et al 2007Oehmigen et al 2010). A schematic of the surface DBD is shown in Fig.…”
Section: Treatment Of Mononuclear Cells With Dielectric Barrier Dischmentioning
confidence: 99%
“…Typical precursors for plasma enhanced chemical vapour deposition (PECVD) are, e.g. silane [1], hexamethyldisiloxane (HMDSO) [2,3], and aluminium tri-isopropoxide (ATI). In contrast to silicon-based precursors, which have been widely studied in plasmas, less work was done on the usage of aluminium-based precursors [4].…”
Section: Introductionmentioning
confidence: 99%