(Ba, Sr)(Ti, Mn)O3 Perovskite Films for Co-Planar Waveguide Tunable Microwave Phase Shifters

He, Xin; Bakaimi, Ioanna; Hashim, Nur Zatil Ismah; Wang, Yudong; Mostaed, Ali; Reaney, Ian M.; Luo, Qi; Gao, Steven; Hayden, Brian E.; Groot, C. H. Kees de

doi:10.23919/eumic.2018.8539889

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2022

2024

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“…They have been used in the microwave domain and can achieve high permittivity while maintaining an acceptable loss factor. Such suspensions have been used in microwave applications such as: variable capacitance [11], microwave phase shifters [12] and variable antenna [13]. However, they are complex to produce and maintain.…”

Section: Introductionmentioning

confidence: 99%

RF MEMS filter based on dual liquid variations

Habbachi¹,

Besbes²

2022

J. Micromech. Microeng.

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This paper discusses the behavior of RF MEMS tunable microwave filter. We have modeled the distribution of magnetic field and electric current density in order to reveal the comportment of each device and to evaluate the relation between the frequency response and the microwave performances. From several modelling and simulations, we catch the resonance phenomenon for magnetic and electric fields at different conditions. Hence, in order to develop a reconfigurable MEMS ensuring a function of tunable band-pass filters, we have identified conditions allowing to vary the resonance frequency from Fres = 0.42 GHz to Fres = 1.85 GHz ensuring a large total variation of Tr = 340.5%. The structure is fabricated using SU-8 resin for circulating microchannels and sealing layers. The extracted parameters from measurements results and retro-simulation reveal a diminution of the total tuning range.

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Section: Introductionmentioning

confidence: 99%