Ba Ti O 3 – Sr Ti O 3 multilayer thin film electro-optic waveguide modulator

Abstract

Mach-Zehnder electro-optic waveguide modulators were fabricated based on BaTiO 3 ͑BTO͒-SrTiO 3 ͑STO͒ multilayer thin film stacks grown on single crystal MgO substrates by pulsed laser deposition. X-ray diffraction measurements confirmed the formation of a BTO-STO superlattice with periodicity of 11 unit cells. Strip-loaded waveguides were formed by patterning a Si x N y film deposited onto the BTO-STO stack while Al electrodes of 3 mm length and 13 m separation were fabricated in the vicinity of the active waveguide arm of the Mach-Zehnder modulator. An effective electro-optic coefficient of 73 pm/ V at 1550 nm wavelength was determined for the deposited BTO-STO superlattice by measuring the output intensity as a function of applied electric field.

Optical properties of BaTiO3 thin films: Influence of oxygen pressure utilized during pulsed laser deposition

“…As an example, in epitaxial unalloyed metal-organic-chemical-vapor deposited BTO films, the effective electro-optic coefficient has been reported to increase from 38 pm/V (Ref [2]) up to 360 pm/V [13] near the 1,550 nm wavelength by optimizing the domain structure and electrode configuration for the specific domain distribution [13]. Another demonstrated means to enhance the electro-optic response of BTO films is the formation of periodic superlattice structure with very thin SrTiO 3 layers [14].…”

Size effect on mechanical behavior of Al/Si3N4 multilayers by nanoindentation

“…Nanoscale multilayered composites exhibit distinct electrical [1][2][3], magnetic [4], optical [5,6] and mechanical properties [7][8][9][10], and therefore have attracted an increased research attention for more than a decade [11][12][13][14][15][16]. Increasing interest is also paid on the investigation of mechanical properties of the multilayered composites due to the implication on the reliability issue in the applications.…”

Micropillar compression of Al/SiC nanolaminates

“…Multilayered materials at the nanoscale exhibit unique electrical [1][2][3], magnetic [4], optical [5,6] and mechanical properties [7][8][9]. Metal-ceramic systems, in particular, can be tailored to obtain a combination of high strength, hardness and toughness [8][9][10][11][12][13][14].…”