Back-End-of-Line Compatible Hf0.5Zr0.5O2 Ferroelectric Devices Enabled by Microwave Annealing

Liu, Yinchi; Zhang, Hao; Yang, Jining; Golosov, Dmitriy Anatolyevich; Wu, Xiaohan; Gu, Chenjie; Ding, Shijin; Liu, Wenjun

doi:10.1016/j.chip.2024.100120

Chip

2024

DOI: 10.1016/j.chip.2024.100120

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Back-End-of-Line Compatible Hf0.5Zr0.5O2 Ferroelectric Devices Enabled by Microwave Annealing

Yinchi Liu,

Hao Zhang,

Jining Yang

et al.

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Back-End-of-Line Compatible Hf0.5Zr0.5O2 Ferroelectric Devices Enabled by Microwave Annealing

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