Ianno, N.J.; Snyder, P.G.; Welipitiya, D.; Byun, D.; and Dowben, Peter A., "Optical properties of boron carbide (B 5 C) thin films fabricated by plasma-enhanced chemical-vapor deposition" (1996) ͑Received 7 September 1995; accepted for publication 11 January 1996͒Variable angle of incidence spectroscopic ellipsometry was used to determine the optical constants near the band edge of boron carbide ͑B 5 C͒ thin films deposited on glass and n-type Si͑111͒ via plasma-enhanced chemical-vapor deposition. The index of refraction n, the extinction coefficient k, and the absorption coefficient are reported in the photon energy spectrum between 1.24 and 4 eV. Ellipsometry analysis of B 5 C films on silicon indicates a graded material, while the optical constants of B 5 C on glass are homogeneous. Line shape analyses of absorption data for the films on glass indicate an indirect transition at approximately 0.75 eV and a direct transition at about 1.5 eV.