“…Conversely, STEM‐EELS, which probes the energy losses associated with characteristic, inelastic interactions between the incident electron beam and the specimen, is confined to a thin sample cross‐section, but can achieve sub‐nanometer spatial resolution . Analysis of the EELS low‐loss, or valence, range (<30 eV) can be used to identify interband transitions, like the bandgap, and as we demonstrate here, sub‐bandgap defect levels. When performed in an STEM, compositional and structural information can also be obtained via X‐ray energy‐dispersive spectroscopy (XEDS) and electron diffraction, respectively, allowing for direct correlation between electronic, compositional, and structural information.…”