Bandwidth controlled weakly connected MEMS resonators based narrowband filter

This work presents a novel radio frequency (RF) narrowband Si micro-electro-mechanical systems (MEMS) filter based on capacitively transduced slotted width extensional mode (WEM) resonators. The flexibility of the plate leads to multiple modes near the target frequency. The high Q-factor resonators of around 100 000 enable narrow bandwidth filters with small size and simplified design. The 1-wavelength and 2-wavelength WEMs were first developed as a pair of coupled modes to form a passband. To reduce bandwidth, two plates are coupled with a λ-length coupling beam. The 79.69 MHz coupled plate filter (CPF) achieved a narrow bandwidth of 8.8 kHz, corresponding to a tiny 0.011%. The CPF exhibits an impressive 34.84 dB stopband rejection and 7.82 dB insertion loss with near-zero passband ripple. In summary, the RF MEMS filter presented in this work shows promising potential for application in RF transceiver front-ends.

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

customersupport@researchsolutions.com

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

This site is protected by reCAPTCHA and the Google Privacy Policy and Terms of Service apply.

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

Bandwidth controlled weakly connected MEMS resonators based narrowband filter

Cited by 3 publications

References 46 publications

Investigation of a Bandpass Filter Based on Nonlinear Modal Coupling via 2:1 Internal Resonance of Electrostatically Actuated Clamped-Guided Microbeams

Investigation of a Bandpass Filter Based on Nonlinear Modal Coupling via 2:1 Internal Resonance of Electrostatically Actuated Clamped-Guided Microbeams

A novel narrowband MEMS filter with extensional mode resonators

A mechanically coupled MEMS filter with high-Q width extensional mode resonators

Contact Info

Product

Resources

About