Bandwidth Optimization Design of a Multi Degree of  Freedom MEMS Gyroscope

Si, Chaowei; Han, Guowei; Jin, Ning; Yang, Fuhua

doi:10.3390/s130810550

Cited by 8 publications

(4 citation statements)

References 12 publications

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“…The gyro bandwidth optimized by mechanical method is proposed in Ref. [29], but the bandwidth varies with the temperature. Literature [30] employs eight drive mode units to form a drive band (not a single frequency).…”

Section: Development Of Dual-mass Mems Gyroscope Bandwidth Expansionmentioning

confidence: 99%

Dual-Mass MEMS Gyroscope Structure, Design, and Electrostatic Compensation

Cao¹,

Li²

2018

MEMS Sensors - Design and Application

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Dual-mass MEMS gyroscope is one of the most popular inertial sensors. In this chapter, the structure design and electrostatic compensation technology for dual-mass MEMS gyroscope is introduced. Firstly, a classical dual-mass MEMS gyroscope structure is proposed, how it works as a tuning fork (drive anti-phase mode), and the structure dynamical model together with the monitoring system are presented. Secondly, the imperfect elements during the structure manufacture process are analyzed, and the quadrature error coupling stiffness model for dual-mass structure is proposed. After that, the quadrature error correction system based on coupling stiffness electrostatic compensation method is designed and evaluated. Thirdly, the dual-mass structure sensing mode modal is proposed, and the force rebalancing combs stimulation method is utilized to achieve sensing mode transform function precisely. The bandwidth of sensing open loop is calculated and experimentally proved as 0.54 times with the resonant frequency difference between sensing and drive modes. Then, proportional-integral-phase-leading controller is presented in sensing close loop to expand the bandwidth, and the experiment shows that the bandwidth is improved from 13 to 104 Hz. Finally, the results are concluded and summarized.

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Section: Development Of Dual-mass Mems Gyroscope Bandwidth Expansionmentioning

confidence: 99%

Dual-Mass MEMS Gyroscope Structure, Design, and Electrostatic Compensation

Cao¹,

Li²

2018

MEMS Sensors - Design and Application

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“…In fact, nonlinear phenomena are more common in micro gyros with MDOF drive-mode and sense-mode, and the nonlinear dynamic behavior is more complicated. With the gradual popularization of MDOF micro gyro applications [36,37,38,39,40,41,42], facing the possible nonlinear dynamic problems in the MDOF micro gyro system is unavoidable. In the MDOF micro gyroscope system, since the displacement of the sense module is much smaller than that of the drive module, the stiffness nonlinearity resulting from the large deformation of the elastic beam in the drive module could become the main nonlinearity source.…”

Section: Introductionmentioning

confidence: 99%

Parametric Characteristics and Bifurcation Analysis of Multi-Degree-of-Freedom Micro Gyroscope with Drive Stiffness Nonlinearity

et al. 2019

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The dynamic equations of a four-degree-of-freedom micro gyroscope system were developed considering the nonlinearity of driving stiffness, the primary resonance, and the 1:1 internal resonance. Then, the perturbation analysis was carried out using the method of multiple scales. The influence of stiffness nonlinearity and system parameters on micro-gyro dynamic characteristics, output sensitivity, detection bandwidth, and working stability were discussed based on the analytic and numerical solutions of the dynamic equations. Through the singularity theory, the influence of system parameters on bifurcation behavior was analyzed. The results show that the amplitude jump and multi-stable solutions caused by the nonlinear hardening characteristics of the high robust two-degree-of-freedom drive-mode occur outside the detection bandwidth. In addition, the influence on the bandwidth was weak and the sensitivity of the bandwidth area was slightly reduced. Moreover, saturation existed in the response amplitude of the second drive-mode in spite of the primary resonance being completely tuned or detuned. As a result, although the electrostatic force amplitude was out of the unstable region and even took a larger value, the micro gyroscope obtained a larger stable output. Besides, nonlinearity will lead to energy transfer between various modes of multi-degree-of-freedom micro gyroscopes. That means the response amplitudes could change greatly due to the variation of the external environment even the system is under a constant excitation frequency. Therefore, increasing the stiffness coefficient of the micro beam and the electrostatic force amplitude can maintain the robustness of the system to environmental changes and avoid the occurrence of bifurcation.

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“…Moreover, the coupling mechanisms between two modes and corresponding quadrature error is also of major concern in resonant MEMS gyroscopes [ 15 , 16 , 17 , 18 ]. To overcome the mode matching issue in resonant MEMS gyroscopes, multi-DOF gyroscope designs have been presented in literature [ 9 , 19 , 20 , 21 , 22 , 23 , 24 , 25 ]. The DOF in either drive or sense mode are increased to achieve relatively wide operating bandwidth for increased robustness.…”

Section: Introductionmentioning

confidence: 99%

Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope

et al. 2018

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This paper presents the design and analysis of a multi degree of freedom (DOF) electro-thermally actuated non-resonant MEMS gyroscope with a 3-DOF drive mode and 1-DOF sense mode system. The 3-DOF drive mode system consists of three masses coupled together using suspension beams. The 1-DOF system consists of a single mass whose motion is decoupled from the drive mode using a decoupling frame. The gyroscope is designed to be operated in the flat region between the first two resonant peaks in drive mode, thus minimizing the effect of environmental and fabrication process variations on device performance. The high gain in the flat operational region is achieved by tuning the suspension beams stiffness. A detailed analytical model, considering the dynamics of both the electro-thermal actuator and multi-mass system, is developed. A parametric optimization is carried out, considering the microfabrication process constraints of the Metal Multi-User MEMS Processes (MetalMUMPs), to achieve high gain. The stiffness of suspension beams is optimized such that the sense mode resonant frequency lies in the flat region between the first two resonant peaks in the drive mode. The results acquired through the developed analytical model are verified with the help of 3D finite element method (FEM)-based simulations. The first three resonant frequencies in the drive mode are designed to be 2.51 kHz, 3.68 kHz, and 5.77 kHz, respectively. The sense mode resonant frequency is designed to be 3.13 kHz. At an actuation voltage of 0.2 V, the dynamically amplified drive mode gain in the sense mass is obtained to be 18.6 µm. With this gain, a capacitive change of 28.11 fF and 862.13 fF is achieved corresponding to the sense mode amplitude of 0.15 sans-serifμnormalm and 4.5 sans-serifμnormalm at atmospheric air pressure and in a vacuum, respectively.

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Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope

Cited by 8 publications

References 12 publications

Dual-Mass MEMS Gyroscope Structure, Design, and Electrostatic Compensation

Dual-Mass MEMS Gyroscope Structure, Design, and Electrostatic Compensation

Parametric Characteristics and Bifurcation Analysis of Multi-Degree-of-Freedom Micro Gyroscope with Drive Stiffness Nonlinearity

Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope

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