Bare-Eye View at the Nanoscale: New Visual Interferometric Multi-Indicator (VIMI)

Patsalas, P.; Prouskas, C.; Dimitrakopulos, G. P.; Komninou, Ph.; Karakostas, Th.; Tighe, Adrian; Lidorikis, Elefterios

doi:10.1021/am100532b

Cited by 5 publications

(4 citation statements)

References 39 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Due to these attributes, DLC films are widely used for surface protection in cutting tools [2;3], magnetic storage discs [4], biomedical devices [5][6], antireflection coatings, and optical sensors [7]. Various mechanisms have been proposed in order to describe the formation of sp 3 bonds in DLC films [1,[8][9][10][11]; among them, the most accepted view for amorphous carbon films without significant hydrogen incorporation is that the sp 3 formation is triggered by subsurface densification generated by subplantation of energetic deposited species [1,[9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Exploring the potential of high power impulse magnetron sputtering for growth of diamond-like carbon films

Sarakinos

Braun

Zilkens

et al. 2012

Surface and Coatings Technology

View full text Add to dashboard Cite

Amorphous carbon films are deposited employing high power impulse magnetron sputtering (HiPIMS) at pulsing frequencies of 250 Hz and 1 kHz. Films are also deposited by direct current magnetron sputtering (dcMS), for reference. In both HiPIMS and dcMS cases, unipolar pulsed negative bias voltages up to 150 V are applied to the substrate to tune the energy of the positively charged ions that bombard the growing film. Plasma analysis reveals that HiPIMS leads to generation of a larger number of ions with larger average energies, as compared 2 to dcMS. At the same time, the plasma composition is not affected, with Ar + ions being the dominant ionized species at all deposition conditions. Analysis of the film properties shows that HiPIMS allows for growth of amorphous carbon films with sp 3 bond fraction up to 45% and density up to 2.2 gcm -3 . The corresponding values achieved by dcMS are 30% and 2.05 gcm -3 , respectively. The larger fraction of sp 3 bonds and mass density found in films grown by HiPIMS are explained in light of the more intense ion irradiation provided by the HiPIMS discharge as compared to the dcMS one.

show abstract

Section: Introductionmentioning

confidence: 99%

Exploring the potential of high power impulse magnetron sputtering for growth of diamond-like carbon films

Sarakinos

Braun

Zilkens

et al. 2012

Surface and Coatings Technology

View full text Add to dashboard Cite

show abstract

“…The probability of a C atom being ionized per unit distance (in this case 1 cm) at different locations can then be determined via equation (6) [33].…”

Section: Figures 3(amentioning

confidence: 99%

“…Hydrogen-free diamond-like carbon (DLC) is a versatile material, which exhibits excellent mechanical, electrical and optical properties [1,2]. Due to these features, DLC films are widely used for surface protection in cutting tools [3], magnetic storage disks [4], biomedical devices [5], antireflection coatings, and optical sensors [6]. The properties of DLC thin films are determined by the bonding configuration (sp 3 /sp 2 fraction) of its carbon atoms.…”

Section: Introductionmentioning

confidence: 99%

Investigation of carbon ionization in HiPIMS discharge with a hollow cathode magnetron

Poluektov

Usatov

Kladov³

2021

Plasma Sources Sci. Technol.

View full text Add to dashboard Cite

Study of HiPIMS neon plasma produced by the hollow graphite cathode magnetron was carried out. The pressure is 2.66 Pa and average discharge power is up to 490 W. The emission spectra in the UV spectral regions shows strong lines of carbon and neon ions. The dynamics of the intensities of C + and C lines and their dependency on the discharge power were measured through the side window at a distance of 12 cm from the cathode. Using probe measurements, the plasma parameters inside and outside a hollow cathode magnetron (HCM) with discharge have been determined. The plasma density reaches 1.5 × 10 12 cm 3 and the electron temperature is 6 eV at a distance of 12 cm. The EEDF shows the presence of electrons with energy up to 32 eV. The goal of this research is to investigate the carbon ionization in the HiPIMS discharge with a HCM.

show abstract

“…In addition, spectroscopic reflectance has been successfully employed in the measurement of the optical properties of transparent and semi-transparent films, such as real and imaginary parts of the refractive index and band gap [5]. Besides thin-film metrology [3], SR has also been demonstrated in sensing applications [6,7], whereby nanometer-scale changes in thickness due to the presence of an analyte can be easily monitored and recorded.…”

Section: Introductionmentioning

confidence: 99%

Nonlocal Effective Medium (NLEM) for Quantitative Modelling of Nanoroughness in Spectroscopic Reflectance

et al. 2022

Self Cite

View full text Add to dashboard Cite

Spectroscopic reflectance is a versatile optical methodology for the characterization of transparent and semi-transparent thin films in terms of thickness and refractive index. The Fresnel equations are used to interpret the measurements, but their accuracy is limited when surface roughness is present. Nanoroughness can be modelled through a discretized multi-slice and effective medium approach, but to date, this offered mostly qualitative and not quantitative accuracy. Here we introduce an adaptive and nonlocal effective medium approach, which considers the relative size and environment of each discretized slice. We develop our model using finite-difference time-domain simulation results and demonstrate its ability to predict nanoroughness size and shape with relative errors < 3% in a variety of test systems. The accuracy of the model is directly compared to the prediction capabilities of the Bruggeman and Maxwell–Garnett models, highlighting its superiority. Our model is fully parametrized and ready to use for exploring the effects of roughness on reflectance without the need for costly 3D simulations and to be integrated into the Fresnel simulator of spectroscopic reflectance tools.

show abstract

Bare-Eye View at the Nanoscale: New Visual Interferometric Multi-Indicator (VIMI)

Cited by 5 publications

References 39 publications

Exploring the potential of high power impulse magnetron sputtering for growth of diamond-like carbon films

Exploring the potential of high power impulse magnetron sputtering for growth of diamond-like carbon films

Investigation of carbon ionization in HiPIMS discharge with a hollow cathode magnetron

Nonlocal Effective Medium (NLEM) for Quantitative Modelling of Nanoroughness in Spectroscopic Reflectance

Contact Info

Product

Resources

About