Barrier-discharge excilamp on a mixture of krypton and molecular bromine and chlorine

Avdeev, S. M.; Boichenko, A. M.; Соснин, Э. А.; Тарасенко, В. Ф.; Yakovlenko, S. I.

doi:10.1134/s1054660x07090022

Cited by 18 publications

(12 citation statements)

References 14 publications

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“…Однако на практике иногда возникает необходимость в широкополосном или многоволновом источнике излучения, имеющем особый спектральный состав. В качестве таких источников могут также применяться эксилампы, так как им свойственна возможность одновременного возбуждения нескольких сортов эксиплексных молекул [46][47][48][49][50]. Выбирая эксиплексные молекулы, излучающие в желаемом спектральном участке [51], можно получить источник излучения со спектральной характеристикой, представляющей собой комбинацию спектральных характеристик соответствующих эксиплексных молекул.…”

Section: Introductionunclassified

“…Cl 2 ) и p(Br 2 ) -соответственно парциальные давления молекулярного хлора и брома.В работе[49] приводятся результаты экспериментального исследования эксилампы барьерного разряда на трехкомпонентной смеси Kr−Cl 2 −Br 2 . Используем данные этой работы для апробации полученных соотношений.…”

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“…Используем данные этой работы для апробации полученных соотношений. Согласно выражению(12), соотношение парциальных давлений галогеноносителей в смеси Kr−Cl 2 −Br 2 , необходимое для получения соразмерных средних мощностей излучения эксиплексных молекул KrCl * и KrBr * , составляет • 10 −10 cm 3 /s[98].Согласно результатам эксперимента[49], оптимальный состав рабочей смеси, при котором достигается соразмерное излучение эксиплексных молекул KrCl * и KrBr * , таков: Kr/Cl 2 /Br 2 = 200/0.3/0.7 Torr, т. е. оптимальное соотношение парциальных давлений молекулярного брома и хлора составляет p(Br 2 )/ p(Cl 2 ) = 2.3.…”

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Оптимизация Газовых Смесей Многополосных Эксиламп

Бойченко¹,

Кленовский²,

Соснин³

et al. 2023

Журнал Технической Физики

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The paper considers the problem of optimizing gas-discharge sources of multiband UV radiation – excilamps. A method is proposed for estimating the ratio of partial pressures of the components of a gas mixture, which makes it possible to simplify the process of developing a multiband excilamp with the desired power ratio of the emission bands. It is shown that the optimization of a multiband excilamp on a mixture of one noble gas with several halogen carriers can be reduced to the problem of optimizing an excilamp on a two-component mixture. If, in addition to the radiation of exciplex molecules, the radiation of excimer molecules is of importance, then the method makes it possible to control the relative contribution of the powers emitted by these molecules.

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Section: Introductionunclassified

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Оптимизация Газовых Смесей Многополосных Эксиламп

Бойченко¹,

Кленовский²,

Соснин³

et al. 2023

Журнал Технической Физики

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“…Excimer formation in DBDs, originally proposed for use in high-power ultraviolet lamps by Eliasson and Kogelschatz [1], has become a subject of great technical importance, for a A variety of applications in environmental and materials processing, such as UV biological sterilization, photochemical surface treatment, pollution control, plasma display panels, ozone generation, microlithography, photolytic vapor deposition and material deposition in microelectronics [2][3][4][5][6][7][8][9][10]. It has been investigated using many different excited species, including rare gas excimers, molecular rare gas-halide excimers, and halogen dimers [1,[11][12][13][14][15][16][17]. In particularly, excimer and exciplex lamps are predestined for the lighting industry with a long lifetime (up to 4,000 h), as the current is limited by the dielectric and the working mixture does not have a contact with metal electrodes which avoids any reaction between the discharge and the electrodes or contamination of the gas with evaporated electrode material [2,[18][19][20][21][22][23][24][25].…”

Section: Introductionmentioning

confidence: 99%

Electrical Approach of Homogenous High Pressure Ne/Xe/HCl Dielectric Barrier Discharge for XeCl (308 nm) Lamp

Boutarfaïa

Harrache²

2011

Plasma Chem Plasma Process

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This paper reports the investigation of the excimer UV emission efficiency in Ne/Xe/HCl mixture in terms of the homogenous model of a dielectric barrier discharge. The computer model developed is based on the Ne/Xe/HCl gas mixture chemistry, the circuit and the Boltzmann equations. The effects of operating voltage, HCl concentration in the mixture as well as gas pressure on the discharge efficiency and the 172, and 308 nm photon generation, under typical experimental operating conditions, have been investigated and discussed. Calculations suggest that the overall conversion efficiency from electrical energy to VUV emission in the lamp is greater than 27%, and it will be very affected at high voltage amplitude and high gas pressure with a significant dependence on the HCl concentration in the gas mixture.

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“…Originally proposed by Eliasson and Kogelschatz [16], excimer formation in DBDs has a large potential for applications, such as UV biological sterilization, photochemical surface treatment, pollution control, plasma display panels (PDPs), ozone generation, microlithography, photolytic vapour deposition and material deposition in microelectronics [26][27][28][29][30][31][32][33][34]. Over the last few years DBDs' UV sources have been investigated using many different excited species, including rare gas excimers (such as Kr * 2 and Xe * 2 ), molecular rare gas halide excimers (such as ArCl * , KrCl * , XeCl * and XeBr) and halogen dimmers (such as Cl * 2 , F * 2 and Br * 2 ), with high efficiency (>10%) and where a wide range of UV spectrum can be covered [16,17,[35][36][37][38][39][40]. In particular, excimer and exciplex lamps are mercury free systems and ecologically friendly, and therefore they are predestined for the lighting industry [41][42][43][44][45].…”

Section: Introductionmentioning

confidence: 99%

One-dimensional modelling of DBDs in Ne–Xe mixtures for excimer lamps

Boutarfaïa¹,

Khodja²,

Bendella³

et al. 2010

J. Phys. D: Appl. Phys.

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Dielectric barrier discharges (DBDs) are a promising technology for high-intensity sources of specific UV and VUV radiation. In this work, the microdischarge dynamics in DBDs for Ne−Xe mixtures under the close conditions of excimer lamp working has been investigated. The computer model including the cathode fall, the positive column and the dielectric is composed of two coupled sub-models. The first submodel describes the electrical properties of the discharge and is based on a fluid, two-moments description of electron and ion transport coupled with Poisson's equation during the discharge pulse. The second submodel, based on three main modules: a plasma chemistry module, a circuit module and a Boltzmann equation module, with source terms deduced from the electric model, describes the time variations of charged and excited species concentrations and the UV photon emission. The use of the present description allows a good resolution near the sheath at high pressure and it predicts correctly the waveform of the discharge behavior. The effects of operation voltage, dielectric capacitance, gas mixture composition, gas pressure, as well as the secondary electron emission by ion at the cathode on the discharge characteristics and the 173 nm photon generation have been investigated and discussed.

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Barrier-discharge excilamp on a mixture of krypton and molecular bromine and chlorine

Cited by 18 publications

References 14 publications

Оптимизация Газовых Смесей Многополосных Эксиламп

Оптимизация Газовых Смесей Многополосных Эксиламп

Electrical Approach of Homogenous High Pressure Ne/Xe/HCl Dielectric Barrier Discharge for XeCl (308 nm) Lamp

One-dimensional modelling of DBDs in Ne–Xe mixtures for excimer lamps

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