Batch-fabricated high dense multi sliders for WDM spectral attenuation

Konishi, Satoshi; Oshima, A.; Kinoshita, Nobuhito; Kumagaya, Ikuo; Kishi, Takayuki; Shimazu, Takayuki; Katayama, M.

doi:10.1109/sensor.2005.1497304

Cited by 5 publications

(1 citation statement)

References 9 publications

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“…Figure 1(a) shows a schematic diagram of an ECLIA that comprises a base frame, a guide structure, holding and driving electrodes, a PZT actuator, and multiple sliders. An ECLIA that can provide precise, parallel motion and a large stroke of multiple sliders has been applied to an optical attenuator for wavelength division multiplexing (WDM) [7] and micro-syringe pumps for picoliter-scale liquid manipulation [8]. The driving electrode deformed and created an air gap between the Si slider and the driving and holding electrodes.…”

Section: Micro-actuatorsmentioning

confidence: 99%

Characterization of sliders for efficient force generation of electrostatically controlled linear actuator

Nguyen¹,

Konishi²

2014

J. Micromech. Microeng.

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In this paper, the characterization of sliders for efficient force generation of an electrostatically controlled linear actuator (ECLIA) is investigated. The ECLIA consists of a piezoactuator (PZT), driving and holding electrodes, multiple sliders and a guide structure. The stepping motion of the sliders is driven by the PZT actuator via an electrostatic clutch mechanism. Thus, multiple sliders can achieve parallel, independent, precise motion, and a large stroke. Previous studies have indicated that the Si bulk slider and Si electrode created an air gap owing to the deformation of the Si electrode. Thus, the Si slider generated a low pushing force. In this study, we propose a fishbone structure mounted on a flexible slider to enhance the pushing force of the slider. The flexible slider, that can deform and fit into the Si electrode to reduce the air gap, results in highly efficient electrostatic-force generation. The fishbone structure improves the longitudinal stiffness of the flexible slider for high pushing-force generation. The results show that the pushing force created by the fishbone slider was three times greater than that of the conventional Si slider. The fishbone and flexible sliders exhibited a high performance for the ECLIA.

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Section: Micro-actuatorsmentioning

confidence: 99%