Batch fabrication of micro grippers with integrated actuators

Abstract

In this paper we present improvements in the field of batch fabricated micro grippers with shape memory alloy (SMA) actuators or pneumatic drives. In this context we illustrate two methods of structuring SMA foils. Moreover, it is shown how the processed SMA elements can be embedded into monolithic SU-8 grippers. We also describe actuator elements for silicon/SU-8 hybrid micro grippers. Furthermore, we report on the advantages of pneumatic micro grippers and how this alternative actuation principle can be fabricated in batch technology. In this regard, a thermoplastic adhesive electrodepositing process is presented.

A two degree of freedom micro-gripper with grasping and rotating functions for optical fibers assembling

“…As shown in Eq. (14), if we want to get a small value of K L , a 2 should be much larger than b. And as shown in Eq.…”

“…Up to now, there have been numerous micro-grippers come into view, which are usually classified by the driving forms namely electro-thermal actuator, 8,9 electrostatic actuator, 10, 11 electromagnetic actuator, 12 shape memory alloy (SMA) actuator, 13,14 and piezoelectric (PZT) actuator. [15][16][17][18][19][20][21] However, making an overview of the existing micro-grippers, it can be found that they are not suitable for the task of optical fiber assembling, which can be explained as below, which can be divided into two types according to their functions and structures.…”

Integrated Micro Process Chains

“…Therefore, controlled picking and highly accurate placing of micro parts is a great challenge. Several research groups have developed handling devices; examples are given for micro-grippers [4], assembly [5], and transportation [6]. As described in [7], micro grippers should be designed in a way to fulfill the following requirements.…”

A comparative analysis of different shape memory alloy actuator configurations

“…SMAs have remarkable characteristics that are exploited as actuators, such as shape memory effect (SME), superelasticity, or pseudoelasticity, and stressassisted two-way memory effect (SATWME). Devices based on SMAs can be related to small forces or displacements as micro-actuators, such as micropumps, microvalves, microgrippers, microswitches, and micropositioners (Choudhary and Kaur, 2016;Hoxhold and Bu¨ttgenbach, 2008;Huang et al, 2004;Nespoli et al, 2010), but it is also associated with systems that require great strength or torque actuation (Dong et al, 2008;Jansen et al, 2004;Spaggiari et al, 2012;Strittmatter and Gu¨mpel, 2004;Paik and Wood, 2012;Zhang and Yin, 2012).…”