Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System

Wei, 王玮 Wang; Bayanheshig, 巴音贺希格; Ming-zhong, 潘明忠 Pan; Ying, 宋莹 Song; Wenhao, 李文昊 Li

doi:10.3788/aos201737.0722003

光学学报

2017

DOI: 10.3788/aos201737.0722003

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Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System

王玮 Wang Wei¹,

巴音贺希格 Bayanheshig²,

潘明忠 Pan Ming-zhong³

et al.

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基于光束扫描的光场匀化技术

Zhang Haidong,

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Zhang Yibin

et al. 2024

光学学报

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Beam Alignment Error and Its Control in Scanning Beam Interference Lithography System

Cited by 1 publication

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基于光束扫描的光场匀化技术

基于光束扫描的光场匀化技术

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