Analyzing the characteristics of a low monitor unit (MU) setting is essential, particularly for intensity-modulated techniques. Intensity modulation can be achieved through intensity-modulated radiotherapy (IMRT) or volumetric-modulated arc therapy (VMAT). There is possibility for low MUs in the segments of IMRT and VMAT plans. The minimum MU/segment must be set by the physicist in the treatment planning system at the time of commissioning. In this study, the characteristics such as dose linearity, stability, flatness, and symmetry of 6 MV photon beam of a Synergy linear accelerator at low MU settings were investigated for different dose rates. The measurements were performed for Synergy linear accelerator using a slab phantom with a FC65-G chamber and Profiler 2. The MU linearity was studied for 1–100 MU using a field size of 10 cm ×10 cm. The linearity error for 1 MU was 4.2%. Flatness of the beam was deteriorated in 1 MU condition. The beam stability and symmetry was well within the specification. Using this study, we conclude that the treatment delivered with <3 MU may result in uncertainty in dose delivery. To ensure the correct dose delivery with less uncertainty, it is recommended to use ≥3 MU as the minimum MU per segment in IMRT and VMAT plans.