Beam displacement and blur caused by fast electron beam deflection

Fast imaging of millimeter-scale areas with beam deflection transmission electron microscopy

“…2d). Here factors that affect image quality may include defocus 35 , increasing aberration 40 , or reduced electron dose. Importantly, the minor reduction of SNRs for 8 deflected tiles in the 3 x 3 configuration have no effect on image stitching (Fig.…”

“…Deflection of electron beams is widely used in lithography and microscopy to avoid unintended exposure of samples [32][33][34] . The control and behavior of beam deflection have been carefully examined down to picosecond time scale [35][36][37] . In comparison, stage movement is often followed by a residual drift and requires a settling time of tens of milliseconds 2,38 .…”

Cathodoluminescence Nanoscopy: State of the Art and Beyond

“…Using a gold photocathode driven by laser pulses and a streak camera for time-resolved detection, they revealed the correlation of local carrier dynamics in GaAs nanostructures with the surface morphology. In parallel with the developments in the laser-driven cathode, advances in ultrafast beam blankers promise a flexible and easily integrated method to generate electron pulses with a broad range of pulse widths and repetition rates, while keeping a good spatial resolution with a typical duration of tens of picoseconds. , In recent years, time-resolved CL with pulsed electron beams in SEM has enabled the dynamic study of exciton diffusion, ,, carrier relaxation, ,− and excited states of DNA . Currently, time-resolved CL studies performed in TEM have also been reported, , making progress toward elucidating structure–function relations at atomic scales.…”

SEM Nano: An Electron Wave Optical Simulation for the Scanning Electron Microscope

“…Resolution of a SEM is theoretically limited by the electron probe which scans the specimen for imaging. In practice, there are multiple other factors (Jon, 2009) such as noise, specimen damage, charging, and beam deflection blurring (Zhang et al, 2020) which further deteriorate resolution. In this work, we focus on probe formation and its effects on resolution in a field-emission SEM using wave optical simulations.…”